8/30/2012	8:58:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2012	8:58:19 AM	Recipe started at 8:58 AM
8/30/2012	8:58:19 AM	Helium valve closed
8/30/2012	8:58:19 AM	H2 valve closed
8/30/2012	8:58:19 AM	BCl3 valve closed
8/30/2012	8:58:19 AM	PH3 valve closed
8/30/2012	8:58:19 AM	SiCl4 pre valve closed
8/30/2012	8:58:19 AM	SiCl4 post valve closed
8/30/2012	8:58:19 AM	Main Vac valve closed
8/30/2012	8:58:19 AM	Bypass valve closed
8/30/2012	8:58:19 AM	Bubbler valve closed
8/30/2012	8:58:19 AM	Helium MFC set to  0.000000
8/30/2012	8:58:19 AM	H2 MFC set to  0.000000
8/30/2012	8:58:19 AM	BCl3 MFC set to  0.000000
8/30/2012	8:58:19 AM	PH3 MFC set to  0.000000
8/30/2012	8:58:19 AM	SiCl4 MFC set to  0.000000
8/30/2012	8:58:19 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	8:58:19 AM	Tube furnace set to 0
8/30/2012	8:58:22 AM	H2 valve closed
8/30/2012	8:58:22 AM	BCl3 valve closed
8/30/2012	8:58:22 AM	PH3 valve closed
8/30/2012	8:58:22 AM	SiCl4 pre valve closed
8/30/2012	8:58:22 AM	SiCl4 post valve closed
8/30/2012	8:58:22 AM	Main Vac valve closed
8/30/2012	8:58:22 AM	Bypass valve closed
8/30/2012	8:58:22 AM	Bubbler valve closed
8/30/2012	8:58:22 AM	Helium valve opened
8/30/2012	8:58:22 AM	Helium MFC set to  500.000000
8/30/2012	8:58:22 AM	H2 MFC set to  0.000000
8/30/2012	8:58:22 AM	BCl3 MFC set to  0.000000
8/30/2012	8:58:22 AM	PH3 MFC set to  0.000000
8/30/2012	8:58:22 AM	SiCl4 MFC set to  0.000000
8/30/2012	8:58:22 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	8:58:22 AM	Tube furnace set to 0
8/30/2012	8:59:35 AM	Helium valve closed
8/30/2012	8:59:35 AM	H2 valve closed
8/30/2012	8:59:35 AM	BCl3 valve closed
8/30/2012	8:59:35 AM	PH3 valve closed
8/30/2012	8:59:35 AM	SiCl4 pre valve closed
8/30/2012	8:59:35 AM	SiCl4 post valve closed
8/30/2012	8:59:35 AM	Main Vac valve closed
8/30/2012	8:59:35 AM	Bypass valve closed
8/30/2012	8:59:35 AM	Bubbler valve closed
8/30/2012	8:59:35 AM	Helium MFC set to  0.000000
8/30/2012	8:59:35 AM	H2 MFC set to  0.000000
8/30/2012	8:59:35 AM	BCl3 MFC set to  0.000000
8/30/2012	8:59:35 AM	PH3 MFC set to  0.000000
8/30/2012	8:59:35 AM	SiCl4 MFC set to  0.000000
8/30/2012	8:59:35 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	8:59:35 AM	Tube furnace set to 0
8/30/2012	8:59:36 AM	Run finished at 8:59 AM
8/30/2012	8:59:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2012	9:03:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2012	9:03:31 AM	Recipe started at 9:03 AM
8/30/2012	9:03:31 AM	Helium valve closed
8/30/2012	9:03:31 AM	H2 valve closed
8/30/2012	9:03:31 AM	BCl3 valve closed
8/30/2012	9:03:31 AM	PH3 valve closed
8/30/2012	9:03:31 AM	SiCl4 pre valve closed
8/30/2012	9:03:31 AM	SiCl4 post valve closed
8/30/2012	9:03:31 AM	Main Vac valve closed
8/30/2012	9:03:31 AM	Bubbler valve closed
8/30/2012	9:03:31 AM	Bypass valve opened
8/30/2012	9:03:31 AM	Helium MFC set to  0.000000
8/30/2012	9:03:31 AM	H2 MFC set to  0.000000
8/30/2012	9:03:31 AM	BCl3 MFC set to  0.000000
8/30/2012	9:03:31 AM	PH3 MFC set to  0.000000
8/30/2012	9:03:31 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:03:31 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:03:31 AM	Tube furnace set to 0
8/30/2012	9:04:47 AM	Helium valve closed
8/30/2012	9:04:47 AM	H2 valve closed
8/30/2012	9:04:47 AM	BCl3 valve closed
8/30/2012	9:04:47 AM	PH3 valve closed
8/30/2012	9:04:47 AM	SiCl4 pre valve closed
8/30/2012	9:04:47 AM	SiCl4 post valve closed
8/30/2012	9:04:47 AM	Main Vac valve closed
8/30/2012	9:04:47 AM	Bubbler valve closed
8/30/2012	9:04:47 AM	Bypass valve opened
8/30/2012	9:04:47 AM	Helium MFC set to  0.000000
8/30/2012	9:04:47 AM	H2 MFC set to  0.000000
8/30/2012	9:04:47 AM	BCl3 MFC set to  0.000000
8/30/2012	9:04:47 AM	PH3 MFC set to  0.000000
8/30/2012	9:04:47 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:04:47 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:04:47 AM	Tube furnace set to 0
8/30/2012	9:05:47 AM	Helium valve closed
8/30/2012	9:05:47 AM	H2 valve closed
8/30/2012	9:05:47 AM	BCl3 valve closed
8/30/2012	9:05:47 AM	PH3 valve closed
8/30/2012	9:05:47 AM	SiCl4 pre valve closed
8/30/2012	9:05:47 AM	SiCl4 post valve closed
8/30/2012	9:05:47 AM	Bypass valve closed
8/30/2012	9:05:47 AM	Bubbler valve closed
8/30/2012	9:05:47 AM	Main Vac valve opened
8/30/2012	9:05:47 AM	Helium MFC set to  0.000000
8/30/2012	9:05:47 AM	H2 MFC set to  0.000000
8/30/2012	9:05:47 AM	BCl3 MFC set to  0.000000
8/30/2012	9:05:47 AM	PH3 MFC set to  0.000000
8/30/2012	9:05:47 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:05:47 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:05:47 AM	Tube furnace set to 0
8/30/2012	9:05:48 AM	Run finished at 9:05 AM
8/30/2012	9:05:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2012	9:07:50 AM	Recipe started at 9:07 AM
8/30/2012	9:07:50 AM	Helium valve closed
8/30/2012	9:07:50 AM	H2 valve closed
8/30/2012	9:07:50 AM	BCl3 valve closed
8/30/2012	9:07:50 AM	PH3 valve closed
8/30/2012	9:07:50 AM	SiCl4 pre valve closed
8/30/2012	9:07:50 AM	SiCl4 post valve closed
8/30/2012	9:07:50 AM	Bypass valve closed
8/30/2012	9:07:50 AM	Bubbler valve closed
8/30/2012	9:07:50 AM	Main Vac valve opened
8/30/2012	9:07:50 AM	Helium MFC set to  0.000000
8/30/2012	9:07:50 AM	H2 MFC set to  0.000000
8/30/2012	9:07:50 AM	BCl3 MFC set to  0.000000
8/30/2012	9:07:50 AM	PH3 MFC set to  0.000000
8/30/2012	9:07:50 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:07:50 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:07:50 AM	Tube furnace set to 0
8/30/2012	9:08:20 AM	H2 valve closed
8/30/2012	9:08:20 AM	BCl3 valve closed
8/30/2012	9:08:20 AM	PH3 valve closed
8/30/2012	9:08:20 AM	SiCl4 pre valve closed
8/30/2012	9:08:20 AM	SiCl4 post valve closed
8/30/2012	9:08:20 AM	Bypass valve closed
8/30/2012	9:08:20 AM	Bubbler valve closed
8/30/2012	9:08:20 AM	Helium valve opened
8/30/2012	9:08:20 AM	Main Vac valve opened
8/30/2012	9:08:20 AM	Helium MFC set to  20.000000
8/30/2012	9:08:20 AM	H2 MFC set to  0.000000
8/30/2012	9:08:20 AM	BCl3 MFC set to  0.000000
8/30/2012	9:08:20 AM	PH3 MFC set to  0.000000
8/30/2012	9:08:20 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:08:20 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:08:20 AM	Tube furnace set to 0
8/30/2012	9:08:50 AM	Helium valve closed
8/30/2012	9:08:50 AM	H2 valve closed
8/30/2012	9:08:50 AM	BCl3 valve closed
8/30/2012	9:08:50 AM	PH3 valve closed
8/30/2012	9:08:50 AM	SiCl4 pre valve closed
8/30/2012	9:08:50 AM	SiCl4 post valve closed
8/30/2012	9:08:50 AM	Bypass valve closed
8/30/2012	9:08:50 AM	Bubbler valve closed
8/30/2012	9:08:50 AM	Main Vac valve opened
8/30/2012	9:08:50 AM	Helium MFC set to  0.000000
8/30/2012	9:08:50 AM	H2 MFC set to  0.000000
8/30/2012	9:08:50 AM	BCl3 MFC set to  0.000000
8/30/2012	9:08:50 AM	PH3 MFC set to  0.000000
8/30/2012	9:08:50 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:08:50 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:08:51 AM	Tube furnace set to 0
8/30/2012	9:09:21 AM	H2 valve closed
8/30/2012	9:09:21 AM	BCl3 valve closed
8/30/2012	9:09:21 AM	PH3 valve closed
8/30/2012	9:09:21 AM	SiCl4 pre valve closed
8/30/2012	9:09:21 AM	SiCl4 post valve closed
8/30/2012	9:09:21 AM	Bypass valve closed
8/30/2012	9:09:21 AM	Bubbler valve closed
8/30/2012	9:09:21 AM	Helium valve opened
8/30/2012	9:09:21 AM	Main Vac valve opened
8/30/2012	9:09:21 AM	Helium MFC set to  20.000000
8/30/2012	9:09:21 AM	H2 MFC set to  0.000000
8/30/2012	9:09:21 AM	BCl3 MFC set to  0.000000
8/30/2012	9:09:21 AM	PH3 MFC set to  0.000000
8/30/2012	9:09:21 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:09:21 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:09:21 AM	Tube furnace set to 0
8/30/2012	9:09:51 AM	Helium valve closed
8/30/2012	9:09:51 AM	H2 valve closed
8/30/2012	9:09:51 AM	BCl3 valve closed
8/30/2012	9:09:51 AM	PH3 valve closed
8/30/2012	9:09:51 AM	SiCl4 pre valve closed
8/30/2012	9:09:51 AM	SiCl4 post valve closed
8/30/2012	9:09:51 AM	Bypass valve closed
8/30/2012	9:09:51 AM	Bubbler valve closed
8/30/2012	9:09:51 AM	Main Vac valve opened
8/30/2012	9:09:51 AM	Helium MFC set to  0.000000
8/30/2012	9:09:51 AM	H2 MFC set to  0.000000
8/30/2012	9:09:51 AM	BCl3 MFC set to  0.000000
8/30/2012	9:09:51 AM	PH3 MFC set to  0.000000
8/30/2012	9:09:51 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:09:51 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:09:51 AM	Tube furnace set to 0
8/30/2012	9:10:21 AM	H2 valve closed
8/30/2012	9:10:21 AM	BCl3 valve closed
8/30/2012	9:10:21 AM	PH3 valve closed
8/30/2012	9:10:21 AM	SiCl4 pre valve closed
8/30/2012	9:10:21 AM	SiCl4 post valve closed
8/30/2012	9:10:21 AM	Bypass valve closed
8/30/2012	9:10:21 AM	Bubbler valve closed
8/30/2012	9:10:21 AM	Helium valve opened
8/30/2012	9:10:21 AM	Main Vac valve opened
8/30/2012	9:10:21 AM	Helium MFC set to  20.000000
8/30/2012	9:10:21 AM	H2 MFC set to  0.000000
8/30/2012	9:10:21 AM	BCl3 MFC set to  0.000000
8/30/2012	9:10:21 AM	PH3 MFC set to  0.000000
8/30/2012	9:10:21 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:10:21 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:10:21 AM	Tube furnace set to 0
8/30/2012	9:10:51 AM	Helium valve closed
8/30/2012	9:10:51 AM	H2 valve closed
8/30/2012	9:10:51 AM	BCl3 valve closed
8/30/2012	9:10:51 AM	PH3 valve closed
8/30/2012	9:10:51 AM	SiCl4 pre valve closed
8/30/2012	9:10:51 AM	SiCl4 post valve closed
8/30/2012	9:10:51 AM	Bypass valve closed
8/30/2012	9:10:51 AM	Bubbler valve closed
8/30/2012	9:10:51 AM	Main Vac valve opened
8/30/2012	9:10:51 AM	Helium MFC set to  0.000000
8/30/2012	9:10:51 AM	H2 MFC set to  0.000000
8/30/2012	9:10:51 AM	BCl3 MFC set to  0.000000
8/30/2012	9:10:51 AM	PH3 MFC set to  0.000000
8/30/2012	9:10:51 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:10:51 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:10:52 AM	Tube furnace set to 0
8/30/2012	9:11:22 AM	H2 valve closed
8/30/2012	9:11:22 AM	BCl3 valve closed
8/30/2012	9:11:22 AM	PH3 valve closed
8/30/2012	9:11:22 AM	SiCl4 pre valve closed
8/30/2012	9:11:22 AM	SiCl4 post valve closed
8/30/2012	9:11:22 AM	Bypass valve closed
8/30/2012	9:11:22 AM	Bubbler valve closed
8/30/2012	9:11:22 AM	Helium valve opened
8/30/2012	9:11:22 AM	Main Vac valve opened
8/30/2012	9:11:22 AM	Helium MFC set to  20.000000
8/30/2012	9:11:22 AM	H2 MFC set to  0.000000
8/30/2012	9:11:22 AM	BCl3 MFC set to  0.000000
8/30/2012	9:11:22 AM	PH3 MFC set to  0.000000
8/30/2012	9:11:22 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:11:22 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:11:22 AM	Tube furnace set to 0
8/30/2012	9:11:52 AM	Helium valve closed
8/30/2012	9:11:52 AM	H2 valve closed
8/30/2012	9:11:52 AM	BCl3 valve closed
8/30/2012	9:11:52 AM	PH3 valve closed
8/30/2012	9:11:52 AM	SiCl4 pre valve closed
8/30/2012	9:11:52 AM	SiCl4 post valve closed
8/30/2012	9:11:52 AM	Bypass valve closed
8/30/2012	9:11:52 AM	Bubbler valve closed
8/30/2012	9:11:52 AM	Main Vac valve opened
8/30/2012	9:11:52 AM	Helium MFC set to  0.000000
8/30/2012	9:11:52 AM	H2 MFC set to  0.000000
8/30/2012	9:11:52 AM	BCl3 MFC set to  0.000000
8/30/2012	9:11:52 AM	PH3 MFC set to  0.000000
8/30/2012	9:11:52 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:11:52 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:11:52 AM	Tube furnace set to 0
8/30/2012	9:12:22 AM	H2 valve closed
8/30/2012	9:12:22 AM	BCl3 valve closed
8/30/2012	9:12:22 AM	PH3 valve closed
8/30/2012	9:12:22 AM	SiCl4 pre valve closed
8/30/2012	9:12:22 AM	SiCl4 post valve closed
8/30/2012	9:12:22 AM	Bypass valve closed
8/30/2012	9:12:22 AM	Bubbler valve closed
8/30/2012	9:12:22 AM	Helium valve opened
8/30/2012	9:12:22 AM	Main Vac valve opened
8/30/2012	9:12:22 AM	Helium MFC set to  20.000000
8/30/2012	9:12:22 AM	H2 MFC set to  0.000000
8/30/2012	9:12:22 AM	BCl3 MFC set to  0.000000
8/30/2012	9:12:22 AM	PH3 MFC set to  0.000000
8/30/2012	9:12:22 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:12:22 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:12:22 AM	Tube furnace set to 0
8/30/2012	9:12:52 AM	Helium valve closed
8/30/2012	9:12:52 AM	H2 valve closed
8/30/2012	9:12:52 AM	BCl3 valve closed
8/30/2012	9:12:52 AM	PH3 valve closed
8/30/2012	9:12:52 AM	SiCl4 pre valve closed
8/30/2012	9:12:52 AM	SiCl4 post valve closed
8/30/2012	9:12:52 AM	Bypass valve closed
8/30/2012	9:12:52 AM	Bubbler valve closed
8/30/2012	9:12:52 AM	Main Vac valve opened
8/30/2012	9:12:52 AM	Helium MFC set to  0.000000
8/30/2012	9:12:52 AM	H2 MFC set to  0.000000
8/30/2012	9:12:52 AM	BCl3 MFC set to  0.000000
8/30/2012	9:12:52 AM	PH3 MFC set to  0.000000
8/30/2012	9:12:52 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:12:52 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:12:52 AM	Tube furnace set to 0
8/30/2012	9:13:22 AM	H2 valve closed
8/30/2012	9:13:22 AM	BCl3 valve closed
8/30/2012	9:13:22 AM	PH3 valve closed
8/30/2012	9:13:22 AM	SiCl4 pre valve closed
8/30/2012	9:13:23 AM	SiCl4 post valve closed
8/30/2012	9:13:23 AM	Bypass valve closed
8/30/2012	9:13:23 AM	Bubbler valve closed
8/30/2012	9:13:23 AM	Helium valve opened
8/30/2012	9:13:23 AM	Main Vac valve opened
8/30/2012	9:13:23 AM	Helium MFC set to  20.000000
8/30/2012	9:13:23 AM	H2 MFC set to  0.000000
8/30/2012	9:13:23 AM	BCl3 MFC set to  0.000000
8/30/2012	9:13:23 AM	PH3 MFC set to  0.000000
8/30/2012	9:13:23 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:13:23 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:13:23 AM	Tube furnace set to 0
8/30/2012	9:13:53 AM	Helium valve closed
8/30/2012	9:13:53 AM	H2 valve closed
8/30/2012	9:13:53 AM	BCl3 valve closed
8/30/2012	9:13:53 AM	PH3 valve closed
8/30/2012	9:13:53 AM	SiCl4 pre valve closed
8/30/2012	9:13:53 AM	SiCl4 post valve closed
8/30/2012	9:13:53 AM	Bypass valve closed
8/30/2012	9:13:53 AM	Bubbler valve closed
8/30/2012	9:13:53 AM	Main Vac valve opened
8/30/2012	9:13:53 AM	Helium MFC set to  0.000000
8/30/2012	9:13:53 AM	H2 MFC set to  0.000000
8/30/2012	9:13:53 AM	BCl3 MFC set to  0.000000
8/30/2012	9:13:53 AM	PH3 MFC set to  0.000000
8/30/2012	9:13:53 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:13:53 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:13:53 AM	Tube furnace set to 0
8/30/2012	9:14:23 AM	H2 valve closed
8/30/2012	9:14:23 AM	BCl3 valve closed
8/30/2012	9:14:23 AM	PH3 valve closed
8/30/2012	9:14:23 AM	SiCl4 pre valve closed
8/30/2012	9:14:23 AM	SiCl4 post valve closed
8/30/2012	9:14:23 AM	Bypass valve closed
8/30/2012	9:14:23 AM	Bubbler valve closed
8/30/2012	9:14:23 AM	Helium valve opened
8/30/2012	9:14:23 AM	Main Vac valve opened
8/30/2012	9:14:23 AM	Helium MFC set to  20.000000
8/30/2012	9:14:23 AM	H2 MFC set to  0.000000
8/30/2012	9:14:23 AM	BCl3 MFC set to  0.000000
8/30/2012	9:14:23 AM	PH3 MFC set to  0.000000
8/30/2012	9:14:23 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:14:23 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:14:23 AM	Tube furnace set to 0
8/30/2012	9:14:53 AM	Helium valve closed
8/30/2012	9:14:53 AM	H2 valve closed
8/30/2012	9:14:53 AM	BCl3 valve closed
8/30/2012	9:14:53 AM	PH3 valve closed
8/30/2012	9:14:53 AM	SiCl4 pre valve closed
8/30/2012	9:14:53 AM	SiCl4 post valve closed
8/30/2012	9:14:53 AM	Bypass valve closed
8/30/2012	9:14:53 AM	Bubbler valve closed
8/30/2012	9:14:53 AM	Main Vac valve opened
8/30/2012	9:14:53 AM	Helium MFC set to  0.000000
8/30/2012	9:14:53 AM	H2 MFC set to  0.000000
8/30/2012	9:14:53 AM	BCl3 MFC set to  0.000000
8/30/2012	9:14:53 AM	PH3 MFC set to  0.000000
8/30/2012	9:14:53 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:14:53 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:14:53 AM	Tube furnace set to 0
8/30/2012	9:15:23 AM	H2 valve closed
8/30/2012	9:15:23 AM	BCl3 valve closed
8/30/2012	9:15:23 AM	PH3 valve closed
8/30/2012	9:15:23 AM	SiCl4 pre valve closed
8/30/2012	9:15:23 AM	SiCl4 post valve closed
8/30/2012	9:15:23 AM	Bypass valve closed
8/30/2012	9:15:23 AM	Bubbler valve closed
8/30/2012	9:15:23 AM	Helium valve opened
8/30/2012	9:15:23 AM	Main Vac valve opened
8/30/2012	9:15:23 AM	Helium MFC set to  20.000000
8/30/2012	9:15:23 AM	H2 MFC set to  0.000000
8/30/2012	9:15:23 AM	BCl3 MFC set to  0.000000
8/30/2012	9:15:23 AM	PH3 MFC set to  0.000000
8/30/2012	9:15:23 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:15:23 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:15:24 AM	Tube furnace set to 0
8/30/2012	9:15:54 AM	Helium valve closed
8/30/2012	9:15:54 AM	H2 valve closed
8/30/2012	9:15:54 AM	BCl3 valve closed
8/30/2012	9:15:54 AM	PH3 valve closed
8/30/2012	9:15:54 AM	SiCl4 pre valve closed
8/30/2012	9:15:54 AM	SiCl4 post valve closed
8/30/2012	9:15:54 AM	Bypass valve closed
8/30/2012	9:15:54 AM	Bubbler valve closed
8/30/2012	9:15:54 AM	Main Vac valve opened
8/30/2012	9:15:54 AM	Helium MFC set to  0.000000
8/30/2012	9:15:54 AM	H2 MFC set to  0.000000
8/30/2012	9:15:54 AM	BCl3 MFC set to  0.000000
8/30/2012	9:15:54 AM	PH3 MFC set to  0.000000
8/30/2012	9:15:54 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:15:54 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:15:54 AM	Tube furnace set to 0
8/30/2012	9:16:24 AM	H2 valve closed
8/30/2012	9:16:24 AM	BCl3 valve closed
8/30/2012	9:16:24 AM	PH3 valve closed
8/30/2012	9:16:24 AM	SiCl4 pre valve closed
8/30/2012	9:16:24 AM	SiCl4 post valve closed
8/30/2012	9:16:24 AM	Bypass valve closed
8/30/2012	9:16:24 AM	Bubbler valve closed
8/30/2012	9:16:24 AM	Helium valve opened
8/30/2012	9:16:24 AM	Main Vac valve opened
8/30/2012	9:16:24 AM	Helium MFC set to  20.000000
8/30/2012	9:16:24 AM	H2 MFC set to  0.000000
8/30/2012	9:16:24 AM	BCl3 MFC set to  0.000000
8/30/2012	9:16:24 AM	PH3 MFC set to  0.000000
8/30/2012	9:16:24 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:16:24 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:16:24 AM	Tube furnace set to 0
8/30/2012	9:16:54 AM	Helium valve closed
8/30/2012	9:16:54 AM	H2 valve closed
8/30/2012	9:16:54 AM	BCl3 valve closed
8/30/2012	9:16:54 AM	PH3 valve closed
8/30/2012	9:16:54 AM	SiCl4 pre valve closed
8/30/2012	9:16:54 AM	SiCl4 post valve closed
8/30/2012	9:16:54 AM	Bypass valve closed
8/30/2012	9:16:54 AM	Bubbler valve closed
8/30/2012	9:16:54 AM	Main Vac valve opened
8/30/2012	9:16:54 AM	Helium MFC set to  0.000000
8/30/2012	9:16:54 AM	H2 MFC set to  0.000000
8/30/2012	9:16:54 AM	BCl3 MFC set to  0.000000
8/30/2012	9:16:54 AM	PH3 MFC set to  0.000000
8/30/2012	9:16:54 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:16:54 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:16:54 AM	Tube furnace set to 200
8/30/2012	9:17:24 AM	H2 valve closed
8/30/2012	9:17:24 AM	BCl3 valve closed
8/30/2012	9:17:24 AM	PH3 valve closed
8/30/2012	9:17:24 AM	SiCl4 pre valve closed
8/30/2012	9:17:24 AM	SiCl4 post valve closed
8/30/2012	9:17:24 AM	Bypass valve closed
8/30/2012	9:17:24 AM	Bubbler valve closed
8/30/2012	9:17:24 AM	Helium valve opened
8/30/2012	9:17:24 AM	Main Vac valve opened
8/30/2012	9:17:24 AM	Helium MFC set to  20.000000
8/30/2012	9:17:24 AM	H2 MFC set to  0.000000
8/30/2012	9:17:24 AM	BCl3 MFC set to  0.000000
8/30/2012	9:17:24 AM	PH3 MFC set to  0.000000
8/30/2012	9:17:24 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:17:24 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:17:25 AM	Tube furnace set to 200
8/30/2012	9:17:55 AM	Helium valve closed
8/30/2012	9:17:55 AM	H2 valve closed
8/30/2012	9:17:55 AM	BCl3 valve closed
8/30/2012	9:17:55 AM	PH3 valve closed
8/30/2012	9:17:55 AM	SiCl4 pre valve closed
8/30/2012	9:17:55 AM	SiCl4 post valve closed
8/30/2012	9:17:55 AM	Bypass valve closed
8/30/2012	9:17:55 AM	Bubbler valve closed
8/30/2012	9:17:55 AM	Main Vac valve opened
8/30/2012	9:17:55 AM	Helium MFC set to  0.000000
8/30/2012	9:17:55 AM	H2 MFC set to  0.000000
8/30/2012	9:17:55 AM	BCl3 MFC set to  0.000000
8/30/2012	9:17:55 AM	PH3 MFC set to  0.000000
8/30/2012	9:17:55 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:17:55 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:17:55 AM	Tube furnace set to 200
8/30/2012	9:18:25 AM	H2 valve closed
8/30/2012	9:18:25 AM	BCl3 valve closed
8/30/2012	9:18:25 AM	PH3 valve closed
8/30/2012	9:18:25 AM	SiCl4 pre valve closed
8/30/2012	9:18:25 AM	SiCl4 post valve closed
8/30/2012	9:18:25 AM	Bypass valve closed
8/30/2012	9:18:25 AM	Bubbler valve closed
8/30/2012	9:18:25 AM	Helium valve opened
8/30/2012	9:18:25 AM	Main Vac valve opened
8/30/2012	9:18:25 AM	Helium MFC set to  20.000000
8/30/2012	9:18:25 AM	H2 MFC set to  0.000000
8/30/2012	9:18:25 AM	BCl3 MFC set to  0.000000
8/30/2012	9:18:25 AM	PH3 MFC set to  0.000000
8/30/2012	9:18:25 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:18:25 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:18:25 AM	Tube furnace set to 200
8/30/2012	9:18:55 AM	Helium valve closed
8/30/2012	9:18:55 AM	H2 valve closed
8/30/2012	9:18:55 AM	BCl3 valve closed
8/30/2012	9:18:55 AM	PH3 valve closed
8/30/2012	9:18:55 AM	SiCl4 pre valve closed
8/30/2012	9:18:55 AM	SiCl4 post valve closed
8/30/2012	9:18:55 AM	Bypass valve closed
8/30/2012	9:18:55 AM	Bubbler valve closed
8/30/2012	9:18:55 AM	Main Vac valve opened
8/30/2012	9:18:55 AM	Helium MFC set to  0.000000
8/30/2012	9:18:55 AM	H2 MFC set to  0.000000
8/30/2012	9:18:55 AM	BCl3 MFC set to  0.000000
8/30/2012	9:18:55 AM	PH3 MFC set to  0.000000
8/30/2012	9:18:55 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:18:55 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:18:55 AM	Tube furnace set to 200
8/30/2012	9:19:25 AM	H2 valve closed
8/30/2012	9:19:25 AM	BCl3 valve closed
8/30/2012	9:19:25 AM	PH3 valve closed
8/30/2012	9:19:25 AM	SiCl4 pre valve closed
8/30/2012	9:19:25 AM	SiCl4 post valve closed
8/30/2012	9:19:25 AM	Bypass valve closed
8/30/2012	9:19:25 AM	Bubbler valve closed
8/30/2012	9:19:25 AM	Helium valve opened
8/30/2012	9:19:25 AM	Main Vac valve opened
8/30/2012	9:19:25 AM	Helium MFC set to  20.000000
8/30/2012	9:19:25 AM	H2 MFC set to  0.000000
8/30/2012	9:19:25 AM	BCl3 MFC set to  0.000000
8/30/2012	9:19:25 AM	PH3 MFC set to  0.000000
8/30/2012	9:19:25 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:19:25 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:19:26 AM	Tube furnace set to 200
8/30/2012	9:19:56 AM	Helium valve closed
8/30/2012	9:19:56 AM	H2 valve closed
8/30/2012	9:19:56 AM	BCl3 valve closed
8/30/2012	9:19:56 AM	PH3 valve closed
8/30/2012	9:19:56 AM	SiCl4 pre valve closed
8/30/2012	9:19:56 AM	SiCl4 post valve closed
8/30/2012	9:19:56 AM	Bypass valve closed
8/30/2012	9:19:56 AM	Bubbler valve closed
8/30/2012	9:19:56 AM	Main Vac valve opened
8/30/2012	9:19:56 AM	Helium MFC set to  0.000000
8/30/2012	9:19:56 AM	H2 MFC set to  0.000000
8/30/2012	9:19:56 AM	BCl3 MFC set to  0.000000
8/30/2012	9:19:56 AM	PH3 MFC set to  0.000000
8/30/2012	9:19:56 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:19:56 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:19:56 AM	Tube furnace set to 200
8/30/2012	9:20:26 AM	H2 valve closed
8/30/2012	9:20:26 AM	BCl3 valve closed
8/30/2012	9:20:26 AM	PH3 valve closed
8/30/2012	9:20:26 AM	SiCl4 pre valve closed
8/30/2012	9:20:26 AM	SiCl4 post valve closed
8/30/2012	9:20:26 AM	Bypass valve closed
8/30/2012	9:20:26 AM	Bubbler valve closed
8/30/2012	9:20:26 AM	Helium valve opened
8/30/2012	9:20:26 AM	Main Vac valve opened
8/30/2012	9:20:26 AM	Helium MFC set to  20.000000
8/30/2012	9:20:26 AM	H2 MFC set to  0.000000
8/30/2012	9:20:26 AM	BCl3 MFC set to  0.000000
8/30/2012	9:20:26 AM	PH3 MFC set to  0.000000
8/30/2012	9:20:26 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:20:26 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:20:26 AM	Tube furnace set to 200
8/30/2012	9:20:56 AM	Helium valve closed
8/30/2012	9:20:56 AM	H2 valve closed
8/30/2012	9:20:56 AM	BCl3 valve closed
8/30/2012	9:20:56 AM	PH3 valve closed
8/30/2012	9:20:56 AM	SiCl4 pre valve closed
8/30/2012	9:20:56 AM	SiCl4 post valve closed
8/30/2012	9:20:56 AM	Bypass valve closed
8/30/2012	9:20:56 AM	Bubbler valve closed
8/30/2012	9:20:56 AM	Main Vac valve opened
8/30/2012	9:20:56 AM	Helium MFC set to  0.000000
8/30/2012	9:20:56 AM	H2 MFC set to  0.000000
8/30/2012	9:20:56 AM	BCl3 MFC set to  0.000000
8/30/2012	9:20:56 AM	PH3 MFC set to  0.000000
8/30/2012	9:20:56 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:20:56 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:20:56 AM	Tube furnace set to 200
8/30/2012	9:21:26 AM	H2 valve closed
8/30/2012	9:21:26 AM	BCl3 valve closed
8/30/2012	9:21:26 AM	PH3 valve closed
8/30/2012	9:21:26 AM	SiCl4 pre valve closed
8/30/2012	9:21:26 AM	SiCl4 post valve closed
8/30/2012	9:21:26 AM	Bypass valve closed
8/30/2012	9:21:26 AM	Bubbler valve closed
8/30/2012	9:21:26 AM	Helium valve opened
8/30/2012	9:21:26 AM	Main Vac valve opened
8/30/2012	9:21:26 AM	Helium MFC set to  20.000000
8/30/2012	9:21:26 AM	H2 MFC set to  0.000000
8/30/2012	9:21:26 AM	BCl3 MFC set to  0.000000
8/30/2012	9:21:26 AM	PH3 MFC set to  0.000000
8/30/2012	9:21:26 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:21:26 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:21:26 AM	Tube furnace set to 200
8/30/2012	9:21:56 AM	Helium valve closed
8/30/2012	9:21:56 AM	H2 valve closed
8/30/2012	9:21:57 AM	BCl3 valve closed
8/30/2012	9:21:57 AM	PH3 valve closed
8/30/2012	9:21:57 AM	SiCl4 pre valve closed
8/30/2012	9:21:57 AM	SiCl4 post valve closed
8/30/2012	9:21:57 AM	Bypass valve closed
8/30/2012	9:21:57 AM	Bubbler valve closed
8/30/2012	9:21:57 AM	Main Vac valve opened
8/30/2012	9:21:57 AM	Helium MFC set to  0.000000
8/30/2012	9:21:57 AM	H2 MFC set to  0.000000
8/30/2012	9:21:57 AM	BCl3 MFC set to  0.000000
8/30/2012	9:21:57 AM	PH3 MFC set to  0.000000
8/30/2012	9:21:57 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:21:57 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:21:57 AM	Tube furnace set to 200
8/30/2012	9:22:27 AM	H2 valve closed
8/30/2012	9:22:27 AM	BCl3 valve closed
8/30/2012	9:22:27 AM	PH3 valve closed
8/30/2012	9:22:27 AM	SiCl4 pre valve closed
8/30/2012	9:22:27 AM	SiCl4 post valve closed
8/30/2012	9:22:27 AM	Bypass valve closed
8/30/2012	9:22:27 AM	Bubbler valve closed
8/30/2012	9:22:27 AM	Helium valve opened
8/30/2012	9:22:27 AM	Main Vac valve opened
8/30/2012	9:22:27 AM	Helium MFC set to  20.000000
8/30/2012	9:22:27 AM	H2 MFC set to  0.000000
8/30/2012	9:22:27 AM	BCl3 MFC set to  0.000000
8/30/2012	9:22:27 AM	PH3 MFC set to  0.000000
8/30/2012	9:22:27 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:22:27 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:22:27 AM	Tube furnace set to 200
8/30/2012	9:22:57 AM	Helium valve closed
8/30/2012	9:22:57 AM	H2 valve closed
8/30/2012	9:22:57 AM	BCl3 valve closed
8/30/2012	9:22:57 AM	PH3 valve closed
8/30/2012	9:22:57 AM	SiCl4 pre valve closed
8/30/2012	9:22:57 AM	SiCl4 post valve closed
8/30/2012	9:22:57 AM	Bypass valve closed
8/30/2012	9:22:57 AM	Bubbler valve closed
8/30/2012	9:22:57 AM	Main Vac valve opened
8/30/2012	9:22:57 AM	Helium MFC set to  0.000000
8/30/2012	9:22:57 AM	H2 MFC set to  0.000000
8/30/2012	9:22:57 AM	BCl3 MFC set to  0.000000
8/30/2012	9:22:57 AM	PH3 MFC set to  0.000000
8/30/2012	9:22:57 AM	SiCl4 MFC set to  0.000000
8/30/2012	9:22:57 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	9:22:57 AM	Tube furnace set to 0
8/30/2012	9:22:58 AM	Run finished at 9:22 AM
8/30/2012	10:14:45 AM	Recipe started at 10:14 AM
8/30/2012	10:14:45 AM	Helium valve closed
8/30/2012	10:14:45 AM	H2 valve closed
8/30/2012	10:14:45 AM	BCl3 valve closed
8/30/2012	10:14:45 AM	PH3 valve closed
8/30/2012	10:14:45 AM	SiCl4 pre valve closed
8/30/2012	10:14:45 AM	SiCl4 post valve closed
8/30/2012	10:14:45 AM	Bypass valve closed
8/30/2012	10:14:45 AM	Bubbler valve closed
8/30/2012	10:14:45 AM	Main Vac valve opened
8/30/2012	10:14:45 AM	Helium MFC set to  0.000000
8/30/2012	10:14:45 AM	H2 MFC set to  0.000000
8/30/2012	10:14:45 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:45 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:45 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:45 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:45 AM	Tube furnace set to 0
8/30/2012	10:14:47 AM	H2 valve closed
8/30/2012	10:14:47 AM	BCl3 valve closed
8/30/2012	10:14:47 AM	PH3 valve closed
8/30/2012	10:14:47 AM	SiCl4 pre valve closed
8/30/2012	10:14:47 AM	SiCl4 post valve closed
8/30/2012	10:14:47 AM	Bypass valve closed
8/30/2012	10:14:47 AM	Bubbler valve closed
8/30/2012	10:14:47 AM	Helium valve opened
8/30/2012	10:14:47 AM	Main Vac valve opened
8/30/2012	10:14:47 AM	Helium MFC set to  20.000000
8/30/2012	10:14:47 AM	H2 MFC set to  0.000000
8/30/2012	10:14:47 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:47 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:47 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:47 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:47 AM	Tube furnace set to 0
8/30/2012	10:14:47 AM	Helium valve closed
8/30/2012	10:14:47 AM	H2 valve closed
8/30/2012	10:14:47 AM	BCl3 valve closed
8/30/2012	10:14:47 AM	PH3 valve closed
8/30/2012	10:14:47 AM	SiCl4 pre valve closed
8/30/2012	10:14:47 AM	SiCl4 post valve closed
8/30/2012	10:14:47 AM	Bypass valve closed
8/30/2012	10:14:47 AM	Bubbler valve closed
8/30/2012	10:14:47 AM	Main Vac valve opened
8/30/2012	10:14:47 AM	Helium MFC set to  0.000000
8/30/2012	10:14:47 AM	H2 MFC set to  0.000000
8/30/2012	10:14:47 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:48 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:48 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:48 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:48 AM	Tube furnace set to 0
8/30/2012	10:14:48 AM	H2 valve closed
8/30/2012	10:14:48 AM	BCl3 valve closed
8/30/2012	10:14:48 AM	PH3 valve closed
8/30/2012	10:14:48 AM	SiCl4 pre valve closed
8/30/2012	10:14:48 AM	SiCl4 post valve closed
8/30/2012	10:14:48 AM	Bypass valve closed
8/30/2012	10:14:48 AM	Bubbler valve closed
8/30/2012	10:14:48 AM	Helium valve opened
8/30/2012	10:14:48 AM	Main Vac valve opened
8/30/2012	10:14:48 AM	Helium MFC set to  20.000000
8/30/2012	10:14:48 AM	H2 MFC set to  0.000000
8/30/2012	10:14:48 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:48 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:48 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:48 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:48 AM	Tube furnace set to 0
8/30/2012	10:14:49 AM	Helium valve closed
8/30/2012	10:14:49 AM	H2 valve closed
8/30/2012	10:14:49 AM	BCl3 valve closed
8/30/2012	10:14:49 AM	PH3 valve closed
8/30/2012	10:14:49 AM	SiCl4 pre valve closed
8/30/2012	10:14:49 AM	SiCl4 post valve closed
8/30/2012	10:14:49 AM	Bypass valve closed
8/30/2012	10:14:49 AM	Bubbler valve closed
8/30/2012	10:14:49 AM	Main Vac valve opened
8/30/2012	10:14:49 AM	Helium MFC set to  0.000000
8/30/2012	10:14:49 AM	H2 MFC set to  0.000000
8/30/2012	10:14:49 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:49 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:49 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:49 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:49 AM	Tube furnace set to 0
8/30/2012	10:14:49 AM	H2 valve closed
8/30/2012	10:14:49 AM	BCl3 valve closed
8/30/2012	10:14:49 AM	PH3 valve closed
8/30/2012	10:14:49 AM	SiCl4 pre valve closed
8/30/2012	10:14:49 AM	SiCl4 post valve closed
8/30/2012	10:14:49 AM	Bypass valve closed
8/30/2012	10:14:49 AM	Bubbler valve closed
8/30/2012	10:14:49 AM	Helium valve opened
8/30/2012	10:14:49 AM	Main Vac valve opened
8/30/2012	10:14:49 AM	Helium MFC set to  20.000000
8/30/2012	10:14:49 AM	H2 MFC set to  0.000000
8/30/2012	10:14:49 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:49 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:49 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:49 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:50 AM	Tube furnace set to 0
8/30/2012	10:14:50 AM	Helium valve closed
8/30/2012	10:14:50 AM	H2 valve closed
8/30/2012	10:14:50 AM	BCl3 valve closed
8/30/2012	10:14:50 AM	PH3 valve closed
8/30/2012	10:14:50 AM	SiCl4 pre valve closed
8/30/2012	10:14:50 AM	SiCl4 post valve closed
8/30/2012	10:14:50 AM	Bypass valve closed
8/30/2012	10:14:50 AM	Bubbler valve closed
8/30/2012	10:14:50 AM	Main Vac valve opened
8/30/2012	10:14:50 AM	Helium MFC set to  0.000000
8/30/2012	10:14:50 AM	H2 MFC set to  0.000000
8/30/2012	10:14:50 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:50 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:50 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:50 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:50 AM	Tube furnace set to 0
8/30/2012	10:14:51 AM	H2 valve closed
8/30/2012	10:14:51 AM	BCl3 valve closed
8/30/2012	10:14:51 AM	PH3 valve closed
8/30/2012	10:14:51 AM	SiCl4 pre valve closed
8/30/2012	10:14:51 AM	SiCl4 post valve closed
8/30/2012	10:14:51 AM	Bypass valve closed
8/30/2012	10:14:51 AM	Bubbler valve closed
8/30/2012	10:14:51 AM	Helium valve opened
8/30/2012	10:14:51 AM	Main Vac valve opened
8/30/2012	10:14:51 AM	Helium MFC set to  20.000000
8/30/2012	10:14:51 AM	H2 MFC set to  0.000000
8/30/2012	10:14:51 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:51 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:51 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:51 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:51 AM	Tube furnace set to 0
8/30/2012	10:14:51 AM	Helium valve closed
8/30/2012	10:14:51 AM	H2 valve closed
8/30/2012	10:14:51 AM	BCl3 valve closed
8/30/2012	10:14:51 AM	PH3 valve closed
8/30/2012	10:14:51 AM	SiCl4 pre valve closed
8/30/2012	10:14:51 AM	SiCl4 post valve closed
8/30/2012	10:14:51 AM	Bypass valve closed
8/30/2012	10:14:51 AM	Bubbler valve closed
8/30/2012	10:14:51 AM	Main Vac valve opened
8/30/2012	10:14:51 AM	Helium MFC set to  0.000000
8/30/2012	10:14:51 AM	H2 MFC set to  0.000000
8/30/2012	10:14:51 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:51 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:51 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:51 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:51 AM	Tube furnace set to 0
8/30/2012	10:14:52 AM	H2 valve closed
8/30/2012	10:14:52 AM	BCl3 valve closed
8/30/2012	10:14:52 AM	PH3 valve closed
8/30/2012	10:14:52 AM	SiCl4 pre valve closed
8/30/2012	10:14:52 AM	SiCl4 post valve closed
8/30/2012	10:14:52 AM	Bypass valve closed
8/30/2012	10:14:52 AM	Bubbler valve closed
8/30/2012	10:14:52 AM	Helium valve opened
8/30/2012	10:14:52 AM	Main Vac valve opened
8/30/2012	10:14:52 AM	Helium MFC set to  20.000000
8/30/2012	10:14:52 AM	H2 MFC set to  0.000000
8/30/2012	10:14:52 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:52 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:52 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:52 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:52 AM	Tube furnace set to 0
8/30/2012	10:14:52 AM	Helium valve closed
8/30/2012	10:14:52 AM	H2 valve closed
8/30/2012	10:14:52 AM	BCl3 valve closed
8/30/2012	10:14:52 AM	PH3 valve closed
8/30/2012	10:14:52 AM	SiCl4 pre valve closed
8/30/2012	10:14:52 AM	SiCl4 post valve closed
8/30/2012	10:14:52 AM	Bypass valve closed
8/30/2012	10:14:52 AM	Bubbler valve closed
8/30/2012	10:14:52 AM	Main Vac valve opened
8/30/2012	10:14:52 AM	Helium MFC set to  0.000000
8/30/2012	10:14:52 AM	H2 MFC set to  0.000000
8/30/2012	10:14:52 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:52 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:52 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:52 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:53 AM	Tube furnace set to 0
8/30/2012	10:14:53 AM	H2 valve closed
8/30/2012	10:14:53 AM	BCl3 valve closed
8/30/2012	10:14:53 AM	PH3 valve closed
8/30/2012	10:14:53 AM	SiCl4 pre valve closed
8/30/2012	10:14:53 AM	SiCl4 post valve closed
8/30/2012	10:14:53 AM	Bypass valve closed
8/30/2012	10:14:53 AM	Bubbler valve closed
8/30/2012	10:14:53 AM	Helium valve opened
8/30/2012	10:14:53 AM	Main Vac valve opened
8/30/2012	10:14:53 AM	Helium MFC set to  20.000000
8/30/2012	10:14:53 AM	H2 MFC set to  0.000000
8/30/2012	10:14:53 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:53 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:53 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:53 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:53 AM	Tube furnace set to 0
8/30/2012	10:14:54 AM	Helium valve closed
8/30/2012	10:14:54 AM	H2 valve closed
8/30/2012	10:14:54 AM	BCl3 valve closed
8/30/2012	10:14:54 AM	PH3 valve closed
8/30/2012	10:14:54 AM	SiCl4 pre valve closed
8/30/2012	10:14:54 AM	SiCl4 post valve closed
8/30/2012	10:14:54 AM	Bypass valve closed
8/30/2012	10:14:54 AM	Bubbler valve closed
8/30/2012	10:14:54 AM	Main Vac valve opened
8/30/2012	10:14:54 AM	Helium MFC set to  0.000000
8/30/2012	10:14:54 AM	H2 MFC set to  0.000000
8/30/2012	10:14:54 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:54 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:54 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:54 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:54 AM	Tube furnace set to 0
8/30/2012	10:14:55 AM	H2 valve closed
8/30/2012	10:14:55 AM	BCl3 valve closed
8/30/2012	10:14:55 AM	PH3 valve closed
8/30/2012	10:14:55 AM	SiCl4 pre valve closed
8/30/2012	10:14:55 AM	SiCl4 post valve closed
8/30/2012	10:14:55 AM	Bypass valve closed
8/30/2012	10:14:55 AM	Bubbler valve closed
8/30/2012	10:14:55 AM	Helium valve opened
8/30/2012	10:14:55 AM	Main Vac valve opened
8/30/2012	10:14:55 AM	Helium MFC set to  20.000000
8/30/2012	10:14:55 AM	H2 MFC set to  0.000000
8/30/2012	10:14:55 AM	BCl3 MFC set to  0.000000
8/30/2012	10:14:55 AM	PH3 MFC set to  0.000000
8/30/2012	10:14:55 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:14:55 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:14:56 AM	Tube furnace set to 0
8/30/2012	10:15:26 AM	Helium valve closed
8/30/2012	10:15:26 AM	H2 valve closed
8/30/2012	10:15:26 AM	BCl3 valve closed
8/30/2012	10:15:26 AM	PH3 valve closed
8/30/2012	10:15:26 AM	SiCl4 pre valve closed
8/30/2012	10:15:26 AM	SiCl4 post valve closed
8/30/2012	10:15:26 AM	Bypass valve closed
8/30/2012	10:15:26 AM	Bubbler valve closed
8/30/2012	10:15:26 AM	Main Vac valve opened
8/30/2012	10:15:26 AM	Helium MFC set to  0.000000
8/30/2012	10:15:26 AM	H2 MFC set to  0.000000
8/30/2012	10:15:26 AM	BCl3 MFC set to  0.000000
8/30/2012	10:15:26 AM	PH3 MFC set to  0.000000
8/30/2012	10:15:26 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:15:26 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:15:26 AM	Tube furnace set to 0
8/30/2012	10:15:56 AM	H2 valve closed
8/30/2012	10:15:56 AM	BCl3 valve closed
8/30/2012	10:15:56 AM	PH3 valve closed
8/30/2012	10:15:56 AM	SiCl4 pre valve closed
8/30/2012	10:15:56 AM	SiCl4 post valve closed
8/30/2012	10:15:56 AM	Bypass valve closed
8/30/2012	10:15:56 AM	Bubbler valve closed
8/30/2012	10:15:56 AM	Helium valve opened
8/30/2012	10:15:56 AM	Main Vac valve opened
8/30/2012	10:15:56 AM	Helium MFC set to  20.000000
8/30/2012	10:15:56 AM	H2 MFC set to  0.000000
8/30/2012	10:15:56 AM	BCl3 MFC set to  0.000000
8/30/2012	10:15:56 AM	PH3 MFC set to  0.000000
8/30/2012	10:15:56 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:15:56 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:15:56 AM	Tube furnace set to 0
8/30/2012	10:16:26 AM	Helium valve closed
8/30/2012	10:16:26 AM	H2 valve closed
8/30/2012	10:16:26 AM	BCl3 valve closed
8/30/2012	10:16:26 AM	PH3 valve closed
8/30/2012	10:16:26 AM	SiCl4 pre valve closed
8/30/2012	10:16:26 AM	SiCl4 post valve closed
8/30/2012	10:16:26 AM	Bypass valve closed
8/30/2012	10:16:26 AM	Bubbler valve closed
8/30/2012	10:16:26 AM	Main Vac valve opened
8/30/2012	10:16:26 AM	Helium MFC set to  0.000000
8/30/2012	10:16:26 AM	H2 MFC set to  0.000000
8/30/2012	10:16:26 AM	BCl3 MFC set to  0.000000
8/30/2012	10:16:26 AM	PH3 MFC set to  0.000000
8/30/2012	10:16:26 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:16:26 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:16:26 AM	Tube furnace set to 0
8/30/2012	10:16:56 AM	H2 valve closed
8/30/2012	10:16:56 AM	BCl3 valve closed
8/30/2012	10:16:56 AM	PH3 valve closed
8/30/2012	10:16:56 AM	SiCl4 pre valve closed
8/30/2012	10:16:56 AM	SiCl4 post valve closed
8/30/2012	10:16:56 AM	Bypass valve closed
8/30/2012	10:16:56 AM	Bubbler valve closed
8/30/2012	10:16:56 AM	Helium valve opened
8/30/2012	10:16:56 AM	Main Vac valve opened
8/30/2012	10:16:56 AM	Helium MFC set to  20.000000
8/30/2012	10:16:56 AM	H2 MFC set to  0.000000
8/30/2012	10:16:56 AM	BCl3 MFC set to  0.000000
8/30/2012	10:16:56 AM	PH3 MFC set to  0.000000
8/30/2012	10:16:56 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:16:56 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:16:57 AM	Tube furnace set to 0
8/30/2012	10:17:27 AM	Helium valve closed
8/30/2012	10:17:27 AM	H2 valve closed
8/30/2012	10:17:27 AM	BCl3 valve closed
8/30/2012	10:17:27 AM	PH3 valve closed
8/30/2012	10:17:27 AM	SiCl4 pre valve closed
8/30/2012	10:17:27 AM	SiCl4 post valve closed
8/30/2012	10:17:27 AM	Bypass valve closed
8/30/2012	10:17:27 AM	Bubbler valve closed
8/30/2012	10:17:27 AM	Main Vac valve opened
8/30/2012	10:17:27 AM	Helium MFC set to  0.000000
8/30/2012	10:17:27 AM	H2 MFC set to  0.000000
8/30/2012	10:17:27 AM	BCl3 MFC set to  0.000000
8/30/2012	10:17:27 AM	PH3 MFC set to  0.000000
8/30/2012	10:17:27 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:17:27 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:17:27 AM	Tube furnace set to 200
8/30/2012	10:17:57 AM	H2 valve closed
8/30/2012	10:17:57 AM	BCl3 valve closed
8/30/2012	10:17:57 AM	PH3 valve closed
8/30/2012	10:17:57 AM	SiCl4 pre valve closed
8/30/2012	10:17:57 AM	SiCl4 post valve closed
8/30/2012	10:17:57 AM	Bypass valve closed
8/30/2012	10:17:57 AM	Bubbler valve closed
8/30/2012	10:17:57 AM	Helium valve opened
8/30/2012	10:17:57 AM	Main Vac valve opened
8/30/2012	10:17:57 AM	Helium MFC set to  20.000000
8/30/2012	10:17:57 AM	H2 MFC set to  0.000000
8/30/2012	10:17:57 AM	BCl3 MFC set to  0.000000
8/30/2012	10:17:57 AM	PH3 MFC set to  0.000000
8/30/2012	10:17:57 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:17:57 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:17:57 AM	Tube furnace set to 200
8/30/2012	10:18:27 AM	Helium valve closed
8/30/2012	10:18:27 AM	H2 valve closed
8/30/2012	10:18:27 AM	BCl3 valve closed
8/30/2012	10:18:27 AM	PH3 valve closed
8/30/2012	10:18:27 AM	SiCl4 pre valve closed
8/30/2012	10:18:27 AM	SiCl4 post valve closed
8/30/2012	10:18:27 AM	Bypass valve closed
8/30/2012	10:18:27 AM	Bubbler valve closed
8/30/2012	10:18:27 AM	Main Vac valve opened
8/30/2012	10:18:27 AM	Helium MFC set to  0.000000
8/30/2012	10:18:27 AM	H2 MFC set to  0.000000
8/30/2012	10:18:27 AM	BCl3 MFC set to  0.000000
8/30/2012	10:18:27 AM	PH3 MFC set to  0.000000
8/30/2012	10:18:27 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:18:27 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:18:27 AM	Tube furnace set to 200
8/30/2012	10:18:57 AM	H2 valve closed
8/30/2012	10:18:57 AM	BCl3 valve closed
8/30/2012	10:18:57 AM	PH3 valve closed
8/30/2012	10:18:57 AM	SiCl4 pre valve closed
8/30/2012	10:18:57 AM	SiCl4 post valve closed
8/30/2012	10:18:57 AM	Bypass valve closed
8/30/2012	10:18:57 AM	Bubbler valve closed
8/30/2012	10:18:57 AM	Helium valve opened
8/30/2012	10:18:57 AM	Main Vac valve opened
8/30/2012	10:18:57 AM	Helium MFC set to  20.000000
8/30/2012	10:18:57 AM	H2 MFC set to  0.000000
8/30/2012	10:18:57 AM	BCl3 MFC set to  0.000000
8/30/2012	10:18:57 AM	PH3 MFC set to  0.000000
8/30/2012	10:18:57 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:18:57 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:18:57 AM	Tube furnace set to 200
8/30/2012	10:19:27 AM	Helium valve closed
8/30/2012	10:19:27 AM	H2 valve closed
8/30/2012	10:19:27 AM	BCl3 valve closed
8/30/2012	10:19:27 AM	PH3 valve closed
8/30/2012	10:19:27 AM	SiCl4 pre valve closed
8/30/2012	10:19:27 AM	SiCl4 post valve closed
8/30/2012	10:19:28 AM	Bypass valve closed
8/30/2012	10:19:28 AM	Bubbler valve closed
8/30/2012	10:19:28 AM	Main Vac valve opened
8/30/2012	10:19:28 AM	Helium MFC set to  0.000000
8/30/2012	10:19:28 AM	H2 MFC set to  0.000000
8/30/2012	10:19:28 AM	BCl3 MFC set to  0.000000
8/30/2012	10:19:28 AM	PH3 MFC set to  0.000000
8/30/2012	10:19:28 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:19:28 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:19:28 AM	Tube furnace set to 200
8/30/2012	10:19:58 AM	H2 valve closed
8/30/2012	10:19:58 AM	BCl3 valve closed
8/30/2012	10:19:58 AM	PH3 valve closed
8/30/2012	10:19:58 AM	SiCl4 pre valve closed
8/30/2012	10:19:58 AM	SiCl4 post valve closed
8/30/2012	10:19:58 AM	Bypass valve closed
8/30/2012	10:19:58 AM	Bubbler valve closed
8/30/2012	10:19:58 AM	Helium valve opened
8/30/2012	10:19:58 AM	Main Vac valve opened
8/30/2012	10:19:58 AM	Helium MFC set to  20.000000
8/30/2012	10:19:58 AM	H2 MFC set to  0.000000
8/30/2012	10:19:58 AM	BCl3 MFC set to  0.000000
8/30/2012	10:19:58 AM	PH3 MFC set to  0.000000
8/30/2012	10:19:58 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:19:58 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:19:58 AM	Tube furnace set to 200
8/30/2012	10:20:28 AM	Helium valve closed
8/30/2012	10:20:28 AM	H2 valve closed
8/30/2012	10:20:28 AM	BCl3 valve closed
8/30/2012	10:20:28 AM	PH3 valve closed
8/30/2012	10:20:28 AM	SiCl4 pre valve closed
8/30/2012	10:20:28 AM	SiCl4 post valve closed
8/30/2012	10:20:28 AM	Bypass valve closed
8/30/2012	10:20:28 AM	Bubbler valve closed
8/30/2012	10:20:28 AM	Main Vac valve opened
8/30/2012	10:20:28 AM	Helium MFC set to  0.000000
8/30/2012	10:20:28 AM	H2 MFC set to  0.000000
8/30/2012	10:20:28 AM	BCl3 MFC set to  0.000000
8/30/2012	10:20:28 AM	PH3 MFC set to  0.000000
8/30/2012	10:20:28 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:20:28 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:20:28 AM	Tube furnace set to 200
8/30/2012	10:20:58 AM	H2 valve closed
8/30/2012	10:20:58 AM	BCl3 valve closed
8/30/2012	10:20:58 AM	PH3 valve closed
8/30/2012	10:20:58 AM	SiCl4 pre valve closed
8/30/2012	10:20:58 AM	SiCl4 post valve closed
8/30/2012	10:20:58 AM	Bypass valve closed
8/30/2012	10:20:58 AM	Bubbler valve closed
8/30/2012	10:20:58 AM	Helium valve opened
8/30/2012	10:20:58 AM	Main Vac valve opened
8/30/2012	10:20:58 AM	Helium MFC set to  20.000000
8/30/2012	10:20:58 AM	H2 MFC set to  0.000000
8/30/2012	10:20:58 AM	BCl3 MFC set to  0.000000
8/30/2012	10:20:58 AM	PH3 MFC set to  0.000000
8/30/2012	10:20:58 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:20:58 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:20:58 AM	Tube furnace set to 200
8/30/2012	10:21:28 AM	Helium valve closed
8/30/2012	10:21:28 AM	H2 valve closed
8/30/2012	10:21:28 AM	BCl3 valve closed
8/30/2012	10:21:28 AM	PH3 valve closed
8/30/2012	10:21:28 AM	SiCl4 pre valve closed
8/30/2012	10:21:28 AM	SiCl4 post valve closed
8/30/2012	10:21:28 AM	Bypass valve closed
8/30/2012	10:21:28 AM	Bubbler valve closed
8/30/2012	10:21:28 AM	Main Vac valve opened
8/30/2012	10:21:28 AM	Helium MFC set to  0.000000
8/30/2012	10:21:28 AM	H2 MFC set to  0.000000
8/30/2012	10:21:28 AM	BCl3 MFC set to  0.000000
8/30/2012	10:21:28 AM	PH3 MFC set to  0.000000
8/30/2012	10:21:29 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:21:29 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:21:29 AM	Tube furnace set to 200
8/30/2012	10:21:59 AM	H2 valve closed
8/30/2012	10:21:59 AM	BCl3 valve closed
8/30/2012	10:21:59 AM	PH3 valve closed
8/30/2012	10:21:59 AM	SiCl4 pre valve closed
8/30/2012	10:21:59 AM	SiCl4 post valve closed
8/30/2012	10:21:59 AM	Bypass valve closed
8/30/2012	10:21:59 AM	Bubbler valve closed
8/30/2012	10:21:59 AM	Helium valve opened
8/30/2012	10:21:59 AM	Main Vac valve opened
8/30/2012	10:21:59 AM	Helium MFC set to  20.000000
8/30/2012	10:21:59 AM	H2 MFC set to  0.000000
8/30/2012	10:21:59 AM	BCl3 MFC set to  0.000000
8/30/2012	10:21:59 AM	PH3 MFC set to  0.000000
8/30/2012	10:21:59 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:21:59 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:21:59 AM	Tube furnace set to 200
8/30/2012	10:22:29 AM	Helium valve closed
8/30/2012	10:22:29 AM	H2 valve closed
8/30/2012	10:22:29 AM	BCl3 valve closed
8/30/2012	10:22:29 AM	PH3 valve closed
8/30/2012	10:22:29 AM	SiCl4 pre valve closed
8/30/2012	10:22:29 AM	SiCl4 post valve closed
8/30/2012	10:22:29 AM	Bypass valve closed
8/30/2012	10:22:29 AM	Bubbler valve closed
8/30/2012	10:22:29 AM	Main Vac valve opened
8/30/2012	10:22:29 AM	Helium MFC set to  0.000000
8/30/2012	10:22:29 AM	H2 MFC set to  0.000000
8/30/2012	10:22:29 AM	BCl3 MFC set to  0.000000
8/30/2012	10:22:29 AM	PH3 MFC set to  0.000000
8/30/2012	10:22:29 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:22:29 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:22:29 AM	Tube furnace set to 200
8/30/2012	10:22:59 AM	H2 valve closed
8/30/2012	10:22:59 AM	BCl3 valve closed
8/30/2012	10:22:59 AM	PH3 valve closed
8/30/2012	10:22:59 AM	SiCl4 pre valve closed
8/30/2012	10:22:59 AM	SiCl4 post valve closed
8/30/2012	10:22:59 AM	Bypass valve closed
8/30/2012	10:22:59 AM	Bubbler valve closed
8/30/2012	10:22:59 AM	Helium valve opened
8/30/2012	10:22:59 AM	Main Vac valve opened
8/30/2012	10:22:59 AM	Helium MFC set to  20.000000
8/30/2012	10:22:59 AM	H2 MFC set to  0.000000
8/30/2012	10:22:59 AM	BCl3 MFC set to  0.000000
8/30/2012	10:22:59 AM	PH3 MFC set to  0.000000
8/30/2012	10:22:59 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:22:59 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:22:59 AM	Tube furnace set to 200
8/30/2012	10:23:29 AM	Helium valve closed
8/30/2012	10:23:29 AM	H2 valve closed
8/30/2012	10:23:29 AM	BCl3 valve closed
8/30/2012	10:23:29 AM	PH3 valve closed
8/30/2012	10:23:29 AM	SiCl4 pre valve closed
8/30/2012	10:23:29 AM	SiCl4 post valve closed
8/30/2012	10:23:29 AM	Bypass valve closed
8/30/2012	10:23:29 AM	Bubbler valve closed
8/30/2012	10:23:29 AM	Main Vac valve opened
8/30/2012	10:23:29 AM	Helium MFC set to  0.000000
8/30/2012	10:23:29 AM	H2 MFC set to  0.000000
8/30/2012	10:23:29 AM	BCl3 MFC set to  0.000000
8/30/2012	10:23:29 AM	PH3 MFC set to  0.000000
8/30/2012	10:23:29 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:23:29 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:23:30 AM	Tube furnace set to 0
8/30/2012	10:23:31 AM	Run finished at 10:23 AM
8/30/2012	10:33:09 AM	Main Vac valve closed
8/30/2012	10:33:25 AM	Main Vac valve opened
8/30/2012	10:34:09 AM	Recipe started at 10:34 AM
8/30/2012	10:34:09 AM	Helium valve closed
8/30/2012	10:34:09 AM	H2 valve closed
8/30/2012	10:34:09 AM	BCl3 valve closed
8/30/2012	10:34:09 AM	PH3 valve closed
8/30/2012	10:34:09 AM	SiCl4 pre valve closed
8/30/2012	10:34:09 AM	SiCl4 post valve closed
8/30/2012	10:34:09 AM	Main Vac valve closed
8/30/2012	10:34:09 AM	Bypass valve closed
8/30/2012	10:34:09 AM	Bubbler valve closed
8/30/2012	10:34:09 AM	Helium MFC set to  0.000000
8/30/2012	10:34:09 AM	H2 MFC set to  0.000000
8/30/2012	10:34:09 AM	BCl3 MFC set to  0.000000
8/30/2012	10:34:09 AM	PH3 MFC set to  0.000000
8/30/2012	10:34:09 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:34:09 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:34:09 AM	Tube furnace set to 0
8/30/2012	10:34:12 AM	Helium valve closed
8/30/2012	10:34:12 AM	BCl3 valve closed
8/30/2012	10:34:12 AM	PH3 valve closed
8/30/2012	10:34:12 AM	SiCl4 pre valve closed
8/30/2012	10:34:12 AM	SiCl4 post valve closed
8/30/2012	10:34:12 AM	Main Vac valve closed
8/30/2012	10:34:12 AM	Bypass valve closed
8/30/2012	10:34:12 AM	Bubbler valve closed
8/30/2012	10:34:12 AM	H2 valve opened
8/30/2012	10:34:12 AM	Helium MFC set to  0.000000
8/30/2012	10:34:12 AM	H2 MFC set to  500.000000
8/30/2012	10:34:12 AM	BCl3 MFC set to  0.000000
8/30/2012	10:34:12 AM	PH3 MFC set to  0.000000
8/30/2012	10:34:12 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:34:12 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:34:12 AM	Tube furnace set to 0
8/30/2012	10:35:24 AM	Helium valve closed
8/30/2012	10:35:24 AM	BCl3 valve closed
8/30/2012	10:35:24 AM	PH3 valve closed
8/30/2012	10:35:24 AM	SiCl4 pre valve closed
8/30/2012	10:35:24 AM	SiCl4 post valve closed
8/30/2012	10:35:24 AM	Main Vac valve closed
8/30/2012	10:35:24 AM	Bypass valve closed
8/30/2012	10:35:24 AM	H2 valve opened
8/30/2012	10:35:24 AM	Bubbler valve opened
8/30/2012	10:35:24 AM	Helium MFC set to  0.000000
8/30/2012	10:35:24 AM	H2 MFC set to  500.000000
8/30/2012	10:35:24 AM	BCl3 MFC set to  0.000000
8/30/2012	10:35:24 AM	PH3 MFC set to  0.000000
8/30/2012	10:35:24 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:35:24 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:35:24 AM	Tube furnace set to 0
8/30/2012	10:35:25 AM	Helium valve closed
8/30/2012	10:35:25 AM	BCl3 valve closed
8/30/2012	10:35:25 AM	PH3 valve closed
8/30/2012	10:35:25 AM	SiCl4 pre valve closed
8/30/2012	10:35:25 AM	SiCl4 post valve closed
8/30/2012	10:35:25 AM	Main Vac valve closed
8/30/2012	10:35:25 AM	Bypass valve closed
8/30/2012	10:35:25 AM	H2 valve opened
8/30/2012	10:35:25 AM	Bubbler valve opened
8/30/2012	10:35:25 AM	Helium MFC set to  0.000000
8/30/2012	10:35:25 AM	H2 MFC set to  500.000000
8/30/2012	10:35:25 AM	BCl3 MFC set to  0.000000
8/30/2012	10:35:25 AM	PH3 MFC set to  0.000000
8/30/2012	10:35:25 AM	SiCl4 MFC set to  0.000000
8/30/2012	10:35:25 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:35:25 AM	Tube furnace set to 1000
8/30/2012	10:55:25 AM	Helium valve closed
8/30/2012	10:55:25 AM	PH3 valve closed
8/30/2012	10:55:25 AM	Main Vac valve closed
8/30/2012	10:55:25 AM	Bypass valve closed
8/30/2012	10:55:25 AM	H2 valve opened
8/30/2012	10:55:25 AM	BCl3 valve opened
8/30/2012	10:55:25 AM	SiCl4 pre valve opened
8/30/2012	10:55:25 AM	SiCl4 post valve opened
8/30/2012	10:55:25 AM	Bubbler valve opened
8/30/2012	10:55:25 AM	Helium MFC set to  0.000000
8/30/2012	10:55:25 AM	H2 MFC set to  450.000000
8/30/2012	10:55:25 AM	BCl3 MFC set to  1.500000
8/30/2012	10:55:25 AM	PH3 MFC set to  0.000000
8/30/2012	10:55:25 AM	SiCl4 MFC set to  50.000000
8/30/2012	10:55:25 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	10:55:25 AM	Tube furnace set to 1000
8/30/2012	11:08:25 AM	Helium valve closed
8/30/2012	11:08:25 AM	BCl3 valve closed
8/30/2012	11:08:25 AM	PH3 valve closed
8/30/2012	11:08:25 AM	SiCl4 pre valve closed
8/30/2012	11:08:25 AM	SiCl4 post valve closed
8/30/2012	11:08:25 AM	Main Vac valve closed
8/30/2012	11:08:25 AM	Bypass valve closed
8/30/2012	11:08:25 AM	H2 valve opened
8/30/2012	11:08:25 AM	Bubbler valve opened
8/30/2012	11:08:25 AM	Helium MFC set to  0.000000
8/30/2012	11:08:25 AM	H2 MFC set to  500.000000
8/30/2012	11:08:25 AM	BCl3 MFC set to  0.000000
8/30/2012	11:08:25 AM	PH3 MFC set to  0.000000
8/30/2012	11:08:25 AM	SiCl4 MFC set to  0.000000
8/30/2012	11:08:25 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	11:08:26 AM	Tube furnace set to 950
8/30/2012	11:10:26 AM	Helium valve closed
8/30/2012	11:10:26 AM	BCl3 valve closed
8/30/2012	11:10:26 AM	PH3 valve closed
8/30/2012	11:10:26 AM	SiCl4 pre valve closed
8/30/2012	11:10:26 AM	SiCl4 post valve closed
8/30/2012	11:10:26 AM	Main Vac valve closed
8/30/2012	11:10:26 AM	Bypass valve closed
8/30/2012	11:10:26 AM	H2 valve opened
8/30/2012	11:10:26 AM	Bubbler valve opened
8/30/2012	11:10:26 AM	Helium MFC set to  0.000000
8/30/2012	11:10:26 AM	H2 MFC set to  500.000000
8/30/2012	11:10:26 AM	BCl3 MFC set to  0.000000
8/30/2012	11:10:26 AM	PH3 MFC set to  0.000000
8/30/2012	11:10:26 AM	SiCl4 MFC set to  0.000000
8/30/2012	11:10:26 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	11:10:26 AM	Tube furnace set to 900
8/30/2012	11:12:26 AM	Helium valve closed
8/30/2012	11:12:26 AM	BCl3 valve closed
8/30/2012	11:12:26 AM	PH3 valve closed
8/30/2012	11:12:26 AM	SiCl4 pre valve closed
8/30/2012	11:12:26 AM	SiCl4 post valve closed
8/30/2012	11:12:26 AM	Main Vac valve closed
8/30/2012	11:12:26 AM	Bypass valve closed
8/30/2012	11:12:26 AM	H2 valve opened
8/30/2012	11:12:26 AM	Bubbler valve opened
8/30/2012	11:12:26 AM	Helium MFC set to  0.000000
8/30/2012	11:12:26 AM	H2 MFC set to  500.000000
8/30/2012	11:12:26 AM	BCl3 MFC set to  0.000000
8/30/2012	11:12:26 AM	PH3 MFC set to  0.000000
8/30/2012	11:12:26 AM	SiCl4 MFC set to  0.000000
8/30/2012	11:12:26 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	11:12:26 AM	Tube furnace set to 850
8/30/2012	11:14:26 AM	H2 valve closed
8/30/2012	11:14:26 AM	BCl3 valve closed
8/30/2012	11:14:26 AM	PH3 valve closed
8/30/2012	11:14:26 AM	SiCl4 pre valve closed
8/30/2012	11:14:26 AM	SiCl4 post valve closed
8/30/2012	11:14:26 AM	Main Vac valve closed
8/30/2012	11:14:26 AM	Bypass valve closed
8/30/2012	11:14:26 AM	Helium valve opened
8/30/2012	11:14:26 AM	Bubbler valve opened
8/30/2012	11:14:26 AM	Helium MFC set to  500.000000
8/30/2012	11:14:26 AM	H2 MFC set to  0.000000
8/30/2012	11:14:26 AM	BCl3 MFC set to  0.000000
8/30/2012	11:14:26 AM	PH3 MFC set to  0.000000
8/30/2012	11:14:26 AM	SiCl4 MFC set to  0.000000
8/30/2012	11:14:26 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	11:14:26 AM	Tube furnace set to 800
8/30/2012	11:16:26 AM	H2 valve closed
8/30/2012	11:16:26 AM	BCl3 valve closed
8/30/2012	11:16:26 AM	PH3 valve closed
8/30/2012	11:16:26 AM	SiCl4 pre valve closed
8/30/2012	11:16:26 AM	SiCl4 post valve closed
8/30/2012	11:16:26 AM	Main Vac valve closed
8/30/2012	11:16:26 AM	Bypass valve closed
8/30/2012	11:16:26 AM	Helium valve opened
8/30/2012	11:16:26 AM	Bubbler valve opened
8/30/2012	11:16:26 AM	Helium MFC set to  500.000000
8/30/2012	11:16:26 AM	H2 MFC set to  0.000000
8/30/2012	11:16:26 AM	BCl3 MFC set to  0.000000
8/30/2012	11:16:26 AM	PH3 MFC set to  0.000000
8/30/2012	11:16:26 AM	SiCl4 MFC set to  0.000000
8/30/2012	11:16:26 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	11:16:27 AM	Tube furnace set to 750
8/30/2012	11:18:27 AM	H2 valve closed
8/30/2012	11:18:27 AM	BCl3 valve closed
8/30/2012	11:18:27 AM	PH3 valve closed
8/30/2012	11:18:27 AM	SiCl4 pre valve closed
8/30/2012	11:18:27 AM	SiCl4 post valve closed
8/30/2012	11:18:27 AM	Main Vac valve closed
8/30/2012	11:18:27 AM	Bypass valve closed
8/30/2012	11:18:27 AM	Helium valve opened
8/30/2012	11:18:27 AM	Bubbler valve opened
8/30/2012	11:18:27 AM	Helium MFC set to  500.000000
8/30/2012	11:18:27 AM	H2 MFC set to  0.000000
8/30/2012	11:18:27 AM	BCl3 MFC set to  0.000000
8/30/2012	11:18:27 AM	PH3 MFC set to  0.000000
8/30/2012	11:18:27 AM	SiCl4 MFC set to  0.000000
8/30/2012	11:18:27 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	11:18:27 AM	Tube furnace set to 0
8/30/2012	11:38:27 AM	Helium valve closed
8/30/2012	11:38:27 AM	H2 valve closed
8/30/2012	11:38:27 AM	BCl3 valve closed
8/30/2012	11:38:27 AM	PH3 valve closed
8/30/2012	11:38:27 AM	SiCl4 pre valve closed
8/30/2012	11:38:27 AM	SiCl4 post valve closed
8/30/2012	11:38:27 AM	Main Vac valve closed
8/30/2012	11:38:27 AM	Bypass valve closed
8/30/2012	11:38:27 AM	Bubbler valve closed
8/30/2012	11:38:27 AM	Helium MFC set to  0.000000
8/30/2012	11:38:27 AM	H2 MFC set to  0.000000
8/30/2012	11:38:27 AM	BCl3 MFC set to  0.000000
8/30/2012	11:38:27 AM	PH3 MFC set to  0.000000
8/30/2012	11:38:27 AM	SiCl4 MFC set to  0.000000
8/30/2012	11:38:27 AM	Bypass solenoid MFC set to  0.000000
8/30/2012	11:38:27 AM	Tube furnace set to 0
8/30/2012	11:38:28 AM	Run finished at 11:38 AM
8/30/2012	12:01:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2012	12:01:11 PM	Recipe started at 12:01 PM
8/30/2012	12:01:11 PM	Helium valve closed
8/30/2012	12:01:11 PM	H2 valve closed
8/30/2012	12:01:11 PM	BCl3 valve closed
8/30/2012	12:01:11 PM	PH3 valve closed
8/30/2012	12:01:11 PM	SiCl4 pre valve closed
8/30/2012	12:01:11 PM	SiCl4 post valve closed
8/30/2012	12:01:11 PM	Main Vac valve closed
8/30/2012	12:01:11 PM	Bypass valve closed
8/30/2012	12:01:11 PM	Bubbler valve closed
8/30/2012	12:01:11 PM	Helium MFC set to  0.000000
8/30/2012	12:01:11 PM	H2 MFC set to  0.000000
8/30/2012	12:01:11 PM	BCl3 MFC set to  0.000000
8/30/2012	12:01:11 PM	PH3 MFC set to  0.000000
8/30/2012	12:01:11 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:01:11 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:01:11 PM	Tube furnace set to 0
8/30/2012	12:01:14 PM	H2 valve closed
8/30/2012	12:01:14 PM	BCl3 valve closed
8/30/2012	12:01:14 PM	PH3 valve closed
8/30/2012	12:01:14 PM	SiCl4 pre valve closed
8/30/2012	12:01:14 PM	SiCl4 post valve closed
8/30/2012	12:01:14 PM	Main Vac valve closed
8/30/2012	12:01:14 PM	Bypass valve closed
8/30/2012	12:01:14 PM	Bubbler valve closed
8/30/2012	12:01:14 PM	Helium valve opened
8/30/2012	12:01:14 PM	Helium MFC set to  500.000000
8/30/2012	12:01:14 PM	H2 MFC set to  0.000000
8/30/2012	12:01:14 PM	BCl3 MFC set to  0.000000
8/30/2012	12:01:14 PM	PH3 MFC set to  0.000000
8/30/2012	12:01:14 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:01:14 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:01:14 PM	Tube furnace set to 0
8/30/2012	12:01:20 PM	Helium valve closed
8/30/2012	12:01:20 PM	H2 valve closed
8/30/2012	12:01:20 PM	BCl3 valve closed
8/30/2012	12:01:20 PM	PH3 valve closed
8/30/2012	12:01:20 PM	SiCl4 pre valve closed
8/30/2012	12:01:20 PM	SiCl4 post valve closed
8/30/2012	12:01:20 PM	Main Vac valve closed
8/30/2012	12:01:20 PM	Bypass valve closed
8/30/2012	12:01:20 PM	Bubbler valve closed
8/30/2012	12:01:20 PM	Helium MFC set to  0.000000
8/30/2012	12:01:20 PM	H2 MFC set to  0.000000
8/30/2012	12:01:20 PM	BCl3 MFC set to  0.000000
8/30/2012	12:01:20 PM	PH3 MFC set to  0.000000
8/30/2012	12:01:20 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:01:20 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:01:20 PM	Tube furnace set to 0
8/30/2012	12:01:21 PM	Run finished at 12:01 PM
8/30/2012	12:01:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2012	12:03:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2012	12:03:52 PM	Recipe started at 12:03 PM
8/30/2012	12:03:52 PM	Helium valve closed
8/30/2012	12:03:52 PM	H2 valve closed
8/30/2012	12:03:52 PM	BCl3 valve closed
8/30/2012	12:03:52 PM	PH3 valve closed
8/30/2012	12:03:52 PM	SiCl4 pre valve closed
8/30/2012	12:03:52 PM	SiCl4 post valve closed
8/30/2012	12:03:52 PM	Main Vac valve closed
8/30/2012	12:03:52 PM	Bubbler valve closed
8/30/2012	12:03:52 PM	Bypass valve opened
8/30/2012	12:03:52 PM	Helium MFC set to  0.000000
8/30/2012	12:03:52 PM	H2 MFC set to  0.000000
8/30/2012	12:03:52 PM	BCl3 MFC set to  0.000000
8/30/2012	12:03:53 PM	PH3 MFC set to  0.000000
8/30/2012	12:03:53 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:03:53 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:03:53 PM	Tube furnace set to 0
8/30/2012	12:05:05 PM	Helium valve closed
8/30/2012	12:05:05 PM	H2 valve closed
8/30/2012	12:05:05 PM	BCl3 valve closed
8/30/2012	12:05:05 PM	PH3 valve closed
8/30/2012	12:05:05 PM	SiCl4 pre valve closed
8/30/2012	12:05:05 PM	SiCl4 post valve closed
8/30/2012	12:05:05 PM	Main Vac valve closed
8/30/2012	12:05:05 PM	Bubbler valve closed
8/30/2012	12:05:05 PM	Bypass valve opened
8/30/2012	12:05:05 PM	Helium MFC set to  0.000000
8/30/2012	12:05:05 PM	H2 MFC set to  0.000000
8/30/2012	12:05:05 PM	BCl3 MFC set to  0.000000
8/30/2012	12:05:05 PM	PH3 MFC set to  0.000000
8/30/2012	12:05:05 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:05:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:05:05 PM	Tube furnace set to 0
8/30/2012	12:06:05 PM	Helium valve closed
8/30/2012	12:06:05 PM	H2 valve closed
8/30/2012	12:06:05 PM	BCl3 valve closed
8/30/2012	12:06:05 PM	PH3 valve closed
8/30/2012	12:06:05 PM	SiCl4 pre valve closed
8/30/2012	12:06:05 PM	SiCl4 post valve closed
8/30/2012	12:06:05 PM	Bypass valve closed
8/30/2012	12:06:05 PM	Bubbler valve closed
8/30/2012	12:06:05 PM	Main Vac valve opened
8/30/2012	12:06:05 PM	Helium MFC set to  0.000000
8/30/2012	12:06:05 PM	H2 MFC set to  0.000000
8/30/2012	12:06:05 PM	BCl3 MFC set to  0.000000
8/30/2012	12:06:05 PM	PH3 MFC set to  0.000000
8/30/2012	12:06:06 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:06:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:06:06 PM	Tube furnace set to 0
8/30/2012	12:06:07 PM	Run finished at 12:06 PM
8/30/2012	12:06:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2012	12:10:32 PM	Recipe started at 12:10 PM
8/30/2012	12:10:32 PM	Helium valve closed
8/30/2012	12:10:32 PM	H2 valve closed
8/30/2012	12:10:32 PM	BCl3 valve closed
8/30/2012	12:10:32 PM	PH3 valve closed
8/30/2012	12:10:32 PM	SiCl4 pre valve closed
8/30/2012	12:10:32 PM	SiCl4 post valve closed
8/30/2012	12:10:32 PM	Bypass valve closed
8/30/2012	12:10:32 PM	Bubbler valve closed
8/30/2012	12:10:32 PM	Main Vac valve opened
8/30/2012	12:10:32 PM	Helium MFC set to  0.000000
8/30/2012	12:10:32 PM	H2 MFC set to  0.000000
8/30/2012	12:10:32 PM	BCl3 MFC set to  0.000000
8/30/2012	12:10:32 PM	PH3 MFC set to  0.000000
8/30/2012	12:10:32 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:10:32 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:10:32 PM	Tube furnace set to 0
8/30/2012	12:11:02 PM	H2 valve closed
8/30/2012	12:11:02 PM	BCl3 valve closed
8/30/2012	12:11:02 PM	PH3 valve closed
8/30/2012	12:11:02 PM	SiCl4 pre valve closed
8/30/2012	12:11:02 PM	SiCl4 post valve closed
8/30/2012	12:11:02 PM	Bypass valve closed
8/30/2012	12:11:02 PM	Bubbler valve closed
8/30/2012	12:11:02 PM	Helium valve opened
8/30/2012	12:11:02 PM	Main Vac valve opened
8/30/2012	12:11:02 PM	Helium MFC set to  20.000000
8/30/2012	12:11:02 PM	H2 MFC set to  0.000000
8/30/2012	12:11:02 PM	BCl3 MFC set to  0.000000
8/30/2012	12:11:02 PM	PH3 MFC set to  0.000000
8/30/2012	12:11:02 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:11:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:11:02 PM	Tube furnace set to 0
8/30/2012	12:11:32 PM	Helium valve closed
8/30/2012	12:11:32 PM	H2 valve closed
8/30/2012	12:11:32 PM	BCl3 valve closed
8/30/2012	12:11:32 PM	PH3 valve closed
8/30/2012	12:11:32 PM	SiCl4 pre valve closed
8/30/2012	12:11:32 PM	SiCl4 post valve closed
8/30/2012	12:11:32 PM	Bypass valve closed
8/30/2012	12:11:32 PM	Bubbler valve closed
8/30/2012	12:11:32 PM	Main Vac valve opened
8/30/2012	12:11:32 PM	Helium MFC set to  0.000000
8/30/2012	12:11:32 PM	H2 MFC set to  0.000000
8/30/2012	12:11:32 PM	BCl3 MFC set to  0.000000
8/30/2012	12:11:32 PM	PH3 MFC set to  0.000000
8/30/2012	12:11:32 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:11:32 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:11:33 PM	Tube furnace set to 0
8/30/2012	12:12:03 PM	H2 valve closed
8/30/2012	12:12:03 PM	BCl3 valve closed
8/30/2012	12:12:03 PM	PH3 valve closed
8/30/2012	12:12:03 PM	SiCl4 pre valve closed
8/30/2012	12:12:03 PM	SiCl4 post valve closed
8/30/2012	12:12:03 PM	Bypass valve closed
8/30/2012	12:12:03 PM	Bubbler valve closed
8/30/2012	12:12:03 PM	Helium valve opened
8/30/2012	12:12:03 PM	Main Vac valve opened
8/30/2012	12:12:03 PM	Helium MFC set to  20.000000
8/30/2012	12:12:03 PM	H2 MFC set to  0.000000
8/30/2012	12:12:03 PM	BCl3 MFC set to  0.000000
8/30/2012	12:12:03 PM	PH3 MFC set to  0.000000
8/30/2012	12:12:03 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:12:03 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:12:03 PM	Tube furnace set to 0
8/30/2012	12:12:33 PM	Helium valve closed
8/30/2012	12:12:33 PM	H2 valve closed
8/30/2012	12:12:33 PM	BCl3 valve closed
8/30/2012	12:12:33 PM	PH3 valve closed
8/30/2012	12:12:33 PM	SiCl4 pre valve closed
8/30/2012	12:12:33 PM	SiCl4 post valve closed
8/30/2012	12:12:33 PM	Bypass valve closed
8/30/2012	12:12:33 PM	Bubbler valve closed
8/30/2012	12:12:33 PM	Main Vac valve opened
8/30/2012	12:12:33 PM	Helium MFC set to  0.000000
8/30/2012	12:12:33 PM	H2 MFC set to  0.000000
8/30/2012	12:12:33 PM	BCl3 MFC set to  0.000000
8/30/2012	12:12:33 PM	PH3 MFC set to  0.000000
8/30/2012	12:12:33 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:12:33 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:12:33 PM	Tube furnace set to 0
8/30/2012	12:13:03 PM	H2 valve closed
8/30/2012	12:13:03 PM	BCl3 valve closed
8/30/2012	12:13:03 PM	PH3 valve closed
8/30/2012	12:13:03 PM	SiCl4 pre valve closed
8/30/2012	12:13:03 PM	SiCl4 post valve closed
8/30/2012	12:13:03 PM	Bypass valve closed
8/30/2012	12:13:03 PM	Bubbler valve closed
8/30/2012	12:13:03 PM	Helium valve opened
8/30/2012	12:13:03 PM	Main Vac valve opened
8/30/2012	12:13:03 PM	Helium MFC set to  20.000000
8/30/2012	12:13:03 PM	H2 MFC set to  0.000000
8/30/2012	12:13:03 PM	BCl3 MFC set to  0.000000
8/30/2012	12:13:03 PM	PH3 MFC set to  0.000000
8/30/2012	12:13:03 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:13:03 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:13:03 PM	Tube furnace set to 0
8/30/2012	12:13:33 PM	Helium valve closed
8/30/2012	12:13:33 PM	H2 valve closed
8/30/2012	12:13:33 PM	BCl3 valve closed
8/30/2012	12:13:33 PM	PH3 valve closed
8/30/2012	12:13:33 PM	SiCl4 pre valve closed
8/30/2012	12:13:33 PM	SiCl4 post valve closed
8/30/2012	12:13:33 PM	Bypass valve closed
8/30/2012	12:13:33 PM	Bubbler valve closed
8/30/2012	12:13:33 PM	Main Vac valve opened
8/30/2012	12:13:33 PM	Helium MFC set to  0.000000
8/30/2012	12:13:33 PM	H2 MFC set to  0.000000
8/30/2012	12:13:33 PM	BCl3 MFC set to  0.000000
8/30/2012	12:13:33 PM	PH3 MFC set to  0.000000
8/30/2012	12:13:33 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:13:33 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:13:33 PM	Tube furnace set to 0
8/30/2012	12:14:03 PM	H2 valve closed
8/30/2012	12:14:03 PM	BCl3 valve closed
8/30/2012	12:14:04 PM	PH3 valve closed
8/30/2012	12:14:04 PM	SiCl4 pre valve closed
8/30/2012	12:14:04 PM	SiCl4 post valve closed
8/30/2012	12:14:04 PM	Bypass valve closed
8/30/2012	12:14:04 PM	Bubbler valve closed
8/30/2012	12:14:04 PM	Helium valve opened
8/30/2012	12:14:04 PM	Main Vac valve opened
8/30/2012	12:14:04 PM	Helium MFC set to  20.000000
8/30/2012	12:14:04 PM	H2 MFC set to  0.000000
8/30/2012	12:14:04 PM	BCl3 MFC set to  0.000000
8/30/2012	12:14:04 PM	PH3 MFC set to  0.000000
8/30/2012	12:14:04 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:14:04 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:14:04 PM	Tube furnace set to 0
8/30/2012	12:14:34 PM	Helium valve closed
8/30/2012	12:14:34 PM	H2 valve closed
8/30/2012	12:14:34 PM	BCl3 valve closed
8/30/2012	12:14:34 PM	PH3 valve closed
8/30/2012	12:14:34 PM	SiCl4 pre valve closed
8/30/2012	12:14:34 PM	SiCl4 post valve closed
8/30/2012	12:14:34 PM	Bypass valve closed
8/30/2012	12:14:34 PM	Bubbler valve closed
8/30/2012	12:14:34 PM	Main Vac valve opened
8/30/2012	12:14:34 PM	Helium MFC set to  0.000000
8/30/2012	12:14:34 PM	H2 MFC set to  0.000000
8/30/2012	12:14:34 PM	BCl3 MFC set to  0.000000
8/30/2012	12:14:34 PM	PH3 MFC set to  0.000000
8/30/2012	12:14:34 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:14:34 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:14:34 PM	Tube furnace set to 0
8/30/2012	12:15:04 PM	H2 valve closed
8/30/2012	12:15:04 PM	BCl3 valve closed
8/30/2012	12:15:04 PM	PH3 valve closed
8/30/2012	12:15:04 PM	SiCl4 pre valve closed
8/30/2012	12:15:04 PM	SiCl4 post valve closed
8/30/2012	12:15:04 PM	Bypass valve closed
8/30/2012	12:15:04 PM	Bubbler valve closed
8/30/2012	12:15:04 PM	Helium valve opened
8/30/2012	12:15:04 PM	Main Vac valve opened
8/30/2012	12:15:04 PM	Helium MFC set to  20.000000
8/30/2012	12:15:04 PM	H2 MFC set to  0.000000
8/30/2012	12:15:04 PM	BCl3 MFC set to  0.000000
8/30/2012	12:15:04 PM	PH3 MFC set to  0.000000
8/30/2012	12:15:04 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:15:04 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:15:04 PM	Tube furnace set to 0
8/30/2012	12:15:34 PM	Helium valve closed
8/30/2012	12:15:34 PM	H2 valve closed
8/30/2012	12:15:34 PM	BCl3 valve closed
8/30/2012	12:15:34 PM	PH3 valve closed
8/30/2012	12:15:34 PM	SiCl4 pre valve closed
8/30/2012	12:15:34 PM	SiCl4 post valve closed
8/30/2012	12:15:34 PM	Bypass valve closed
8/30/2012	12:15:34 PM	Bubbler valve closed
8/30/2012	12:15:34 PM	Main Vac valve opened
8/30/2012	12:15:34 PM	Helium MFC set to  0.000000
8/30/2012	12:15:34 PM	H2 MFC set to  0.000000
8/30/2012	12:15:34 PM	BCl3 MFC set to  0.000000
8/30/2012	12:15:34 PM	PH3 MFC set to  0.000000
8/30/2012	12:15:34 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:15:34 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:15:34 PM	Tube furnace set to 0
8/30/2012	12:16:04 PM	H2 valve closed
8/30/2012	12:16:04 PM	BCl3 valve closed
8/30/2012	12:16:04 PM	PH3 valve closed
8/30/2012	12:16:04 PM	SiCl4 pre valve closed
8/30/2012	12:16:04 PM	SiCl4 post valve closed
8/30/2012	12:16:04 PM	Bypass valve closed
8/30/2012	12:16:04 PM	Bubbler valve closed
8/30/2012	12:16:04 PM	Helium valve opened
8/30/2012	12:16:04 PM	Main Vac valve opened
8/30/2012	12:16:04 PM	Helium MFC set to  20.000000
8/30/2012	12:16:04 PM	H2 MFC set to  0.000000
8/30/2012	12:16:04 PM	BCl3 MFC set to  0.000000
8/30/2012	12:16:04 PM	PH3 MFC set to  0.000000
8/30/2012	12:16:04 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:16:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:16:05 PM	Tube furnace set to 0
8/30/2012	12:16:35 PM	Helium valve closed
8/30/2012	12:16:35 PM	H2 valve closed
8/30/2012	12:16:35 PM	BCl3 valve closed
8/30/2012	12:16:35 PM	PH3 valve closed
8/30/2012	12:16:35 PM	SiCl4 pre valve closed
8/30/2012	12:16:35 PM	SiCl4 post valve closed
8/30/2012	12:16:35 PM	Bypass valve closed
8/30/2012	12:16:35 PM	Bubbler valve closed
8/30/2012	12:16:35 PM	Main Vac valve opened
8/30/2012	12:16:35 PM	Helium MFC set to  0.000000
8/30/2012	12:16:35 PM	H2 MFC set to  0.000000
8/30/2012	12:16:35 PM	BCl3 MFC set to  0.000000
8/30/2012	12:16:35 PM	PH3 MFC set to  0.000000
8/30/2012	12:16:35 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:16:35 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:16:35 PM	Tube furnace set to 0
8/30/2012	12:17:05 PM	H2 valve closed
8/30/2012	12:17:05 PM	BCl3 valve closed
8/30/2012	12:17:05 PM	PH3 valve closed
8/30/2012	12:17:05 PM	SiCl4 pre valve closed
8/30/2012	12:17:05 PM	SiCl4 post valve closed
8/30/2012	12:17:05 PM	Bypass valve closed
8/30/2012	12:17:05 PM	Bubbler valve closed
8/30/2012	12:17:05 PM	Helium valve opened
8/30/2012	12:17:05 PM	Main Vac valve opened
8/30/2012	12:17:05 PM	Helium MFC set to  20.000000
8/30/2012	12:17:05 PM	H2 MFC set to  0.000000
8/30/2012	12:17:05 PM	BCl3 MFC set to  0.000000
8/30/2012	12:17:05 PM	PH3 MFC set to  0.000000
8/30/2012	12:17:05 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:17:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:17:05 PM	Tube furnace set to 0
8/30/2012	12:17:35 PM	Helium valve closed
8/30/2012	12:17:35 PM	H2 valve closed
8/30/2012	12:17:35 PM	BCl3 valve closed
8/30/2012	12:17:35 PM	PH3 valve closed
8/30/2012	12:17:35 PM	SiCl4 pre valve closed
8/30/2012	12:17:35 PM	SiCl4 post valve closed
8/30/2012	12:17:35 PM	Bypass valve closed
8/30/2012	12:17:35 PM	Bubbler valve closed
8/30/2012	12:17:35 PM	Main Vac valve opened
8/30/2012	12:17:35 PM	Helium MFC set to  0.000000
8/30/2012	12:17:35 PM	H2 MFC set to  0.000000
8/30/2012	12:17:35 PM	BCl3 MFC set to  0.000000
8/30/2012	12:17:35 PM	PH3 MFC set to  0.000000
8/30/2012	12:17:35 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:17:35 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:17:35 PM	Tube furnace set to 0
8/30/2012	12:18:05 PM	H2 valve closed
8/30/2012	12:18:05 PM	BCl3 valve closed
8/30/2012	12:18:05 PM	PH3 valve closed
8/30/2012	12:18:05 PM	SiCl4 pre valve closed
8/30/2012	12:18:05 PM	SiCl4 post valve closed
8/30/2012	12:18:05 PM	Bypass valve closed
8/30/2012	12:18:05 PM	Bubbler valve closed
8/30/2012	12:18:05 PM	Helium valve opened
8/30/2012	12:18:05 PM	Main Vac valve opened
8/30/2012	12:18:05 PM	Helium MFC set to  20.000000
8/30/2012	12:18:05 PM	H2 MFC set to  0.000000
8/30/2012	12:18:05 PM	BCl3 MFC set to  0.000000
8/30/2012	12:18:05 PM	PH3 MFC set to  0.000000
8/30/2012	12:18:05 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:18:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:18:06 PM	Tube furnace set to 0
8/30/2012	12:18:36 PM	Helium valve closed
8/30/2012	12:18:36 PM	H2 valve closed
8/30/2012	12:18:36 PM	BCl3 valve closed
8/30/2012	12:18:36 PM	PH3 valve closed
8/30/2012	12:18:36 PM	SiCl4 pre valve closed
8/30/2012	12:18:36 PM	SiCl4 post valve closed
8/30/2012	12:18:36 PM	Bypass valve closed
8/30/2012	12:18:36 PM	Bubbler valve closed
8/30/2012	12:18:36 PM	Main Vac valve opened
8/30/2012	12:18:36 PM	Helium MFC set to  0.000000
8/30/2012	12:18:36 PM	H2 MFC set to  0.000000
8/30/2012	12:18:36 PM	BCl3 MFC set to  0.000000
8/30/2012	12:18:36 PM	PH3 MFC set to  0.000000
8/30/2012	12:18:36 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:18:36 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:18:36 PM	Tube furnace set to 0
8/30/2012	12:19:06 PM	H2 valve closed
8/30/2012	12:19:06 PM	BCl3 valve closed
8/30/2012	12:19:06 PM	PH3 valve closed
8/30/2012	12:19:06 PM	SiCl4 pre valve closed
8/30/2012	12:19:06 PM	SiCl4 post valve closed
8/30/2012	12:19:06 PM	Bypass valve closed
8/30/2012	12:19:06 PM	Bubbler valve closed
8/30/2012	12:19:06 PM	Helium valve opened
8/30/2012	12:19:06 PM	Main Vac valve opened
8/30/2012	12:19:06 PM	Helium MFC set to  20.000000
8/30/2012	12:19:06 PM	H2 MFC set to  0.000000
8/30/2012	12:19:06 PM	BCl3 MFC set to  0.000000
8/30/2012	12:19:06 PM	PH3 MFC set to  0.000000
8/30/2012	12:19:06 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:19:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:19:06 PM	Tube furnace set to 0
8/30/2012	12:19:36 PM	Helium valve closed
8/30/2012	12:19:36 PM	H2 valve closed
8/30/2012	12:19:36 PM	BCl3 valve closed
8/30/2012	12:19:36 PM	PH3 valve closed
8/30/2012	12:19:36 PM	SiCl4 pre valve closed
8/30/2012	12:19:36 PM	SiCl4 post valve closed
8/30/2012	12:19:36 PM	Bypass valve closed
8/30/2012	12:19:36 PM	Bubbler valve closed
8/30/2012	12:19:36 PM	Main Vac valve opened
8/30/2012	12:19:36 PM	Helium MFC set to  0.000000
8/30/2012	12:19:36 PM	H2 MFC set to  0.000000
8/30/2012	12:19:36 PM	BCl3 MFC set to  0.000000
8/30/2012	12:19:36 PM	PH3 MFC set to  0.000000
8/30/2012	12:19:36 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:19:36 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:19:36 PM	Tube furnace set to 200
8/30/2012	12:20:06 PM	H2 valve closed
8/30/2012	12:20:06 PM	BCl3 valve closed
8/30/2012	12:20:06 PM	PH3 valve closed
8/30/2012	12:20:06 PM	SiCl4 pre valve closed
8/30/2012	12:20:06 PM	SiCl4 post valve closed
8/30/2012	12:20:06 PM	Bypass valve closed
8/30/2012	12:20:06 PM	Bubbler valve closed
8/30/2012	12:20:06 PM	Helium valve opened
8/30/2012	12:20:06 PM	Main Vac valve opened
8/30/2012	12:20:06 PM	Helium MFC set to  20.000000
8/30/2012	12:20:06 PM	H2 MFC set to  0.000000
8/30/2012	12:20:06 PM	BCl3 MFC set to  0.000000
8/30/2012	12:20:06 PM	PH3 MFC set to  0.000000
8/30/2012	12:20:06 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:20:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:20:07 PM	Tube furnace set to 200
8/30/2012	12:20:37 PM	Helium valve closed
8/30/2012	12:20:37 PM	H2 valve closed
8/30/2012	12:20:37 PM	BCl3 valve closed
8/30/2012	12:20:37 PM	PH3 valve closed
8/30/2012	12:20:37 PM	SiCl4 pre valve closed
8/30/2012	12:20:37 PM	SiCl4 post valve closed
8/30/2012	12:20:37 PM	Bypass valve closed
8/30/2012	12:20:37 PM	Bubbler valve closed
8/30/2012	12:20:37 PM	Main Vac valve opened
8/30/2012	12:20:37 PM	Helium MFC set to  0.000000
8/30/2012	12:20:37 PM	H2 MFC set to  0.000000
8/30/2012	12:20:37 PM	BCl3 MFC set to  0.000000
8/30/2012	12:20:37 PM	PH3 MFC set to  0.000000
8/30/2012	12:20:37 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:20:37 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:20:37 PM	Tube furnace set to 200
8/30/2012	12:21:07 PM	H2 valve closed
8/30/2012	12:21:07 PM	BCl3 valve closed
8/30/2012	12:21:07 PM	PH3 valve closed
8/30/2012	12:21:07 PM	SiCl4 pre valve closed
8/30/2012	12:21:07 PM	SiCl4 post valve closed
8/30/2012	12:21:07 PM	Bypass valve closed
8/30/2012	12:21:07 PM	Bubbler valve closed
8/30/2012	12:21:07 PM	Helium valve opened
8/30/2012	12:21:07 PM	Main Vac valve opened
8/30/2012	12:21:07 PM	Helium MFC set to  20.000000
8/30/2012	12:21:07 PM	H2 MFC set to  0.000000
8/30/2012	12:21:07 PM	BCl3 MFC set to  0.000000
8/30/2012	12:21:07 PM	PH3 MFC set to  0.000000
8/30/2012	12:21:07 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:21:07 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:21:07 PM	Tube furnace set to 200
8/30/2012	12:21:37 PM	Helium valve closed
8/30/2012	12:21:37 PM	H2 valve closed
8/30/2012	12:21:37 PM	BCl3 valve closed
8/30/2012	12:21:37 PM	PH3 valve closed
8/30/2012	12:21:37 PM	SiCl4 pre valve closed
8/30/2012	12:21:37 PM	SiCl4 post valve closed
8/30/2012	12:21:37 PM	Bypass valve closed
8/30/2012	12:21:37 PM	Bubbler valve closed
8/30/2012	12:21:37 PM	Main Vac valve opened
8/30/2012	12:21:37 PM	Helium MFC set to  0.000000
8/30/2012	12:21:37 PM	H2 MFC set to  0.000000
8/30/2012	12:21:37 PM	BCl3 MFC set to  0.000000
8/30/2012	12:21:37 PM	PH3 MFC set to  0.000000
8/30/2012	12:21:37 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:21:37 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:21:37 PM	Tube furnace set to 200
8/30/2012	12:22:07 PM	H2 valve closed
8/30/2012	12:22:07 PM	BCl3 valve closed
8/30/2012	12:22:07 PM	PH3 valve closed
8/30/2012	12:22:07 PM	SiCl4 pre valve closed
8/30/2012	12:22:07 PM	SiCl4 post valve closed
8/30/2012	12:22:07 PM	Bypass valve closed
8/30/2012	12:22:07 PM	Bubbler valve closed
8/30/2012	12:22:07 PM	Helium valve opened
8/30/2012	12:22:07 PM	Main Vac valve opened
8/30/2012	12:22:07 PM	Helium MFC set to  20.000000
8/30/2012	12:22:07 PM	H2 MFC set to  0.000000
8/30/2012	12:22:07 PM	BCl3 MFC set to  0.000000
8/30/2012	12:22:07 PM	PH3 MFC set to  0.000000
8/30/2012	12:22:07 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:22:07 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:22:07 PM	Tube furnace set to 200
8/30/2012	12:22:37 PM	Helium valve closed
8/30/2012	12:22:38 PM	H2 valve closed
8/30/2012	12:22:38 PM	BCl3 valve closed
8/30/2012	12:22:38 PM	PH3 valve closed
8/30/2012	12:22:38 PM	SiCl4 pre valve closed
8/30/2012	12:22:38 PM	SiCl4 post valve closed
8/30/2012	12:22:38 PM	Bypass valve closed
8/30/2012	12:22:38 PM	Bubbler valve closed
8/30/2012	12:22:38 PM	Main Vac valve opened
8/30/2012	12:22:38 PM	Helium MFC set to  0.000000
8/30/2012	12:22:38 PM	H2 MFC set to  0.000000
8/30/2012	12:22:38 PM	BCl3 MFC set to  0.000000
8/30/2012	12:22:38 PM	PH3 MFC set to  0.000000
8/30/2012	12:22:38 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:22:38 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:22:38 PM	Tube furnace set to 200
8/30/2012	12:23:08 PM	H2 valve closed
8/30/2012	12:23:08 PM	BCl3 valve closed
8/30/2012	12:23:08 PM	PH3 valve closed
8/30/2012	12:23:08 PM	SiCl4 pre valve closed
8/30/2012	12:23:08 PM	SiCl4 post valve closed
8/30/2012	12:23:08 PM	Bypass valve closed
8/30/2012	12:23:08 PM	Bubbler valve closed
8/30/2012	12:23:08 PM	Helium valve opened
8/30/2012	12:23:08 PM	Main Vac valve opened
8/30/2012	12:23:08 PM	Helium MFC set to  20.000000
8/30/2012	12:23:08 PM	H2 MFC set to  0.000000
8/30/2012	12:23:08 PM	BCl3 MFC set to  0.000000
8/30/2012	12:23:08 PM	PH3 MFC set to  0.000000
8/30/2012	12:23:08 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:23:08 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:23:08 PM	Tube furnace set to 200
8/30/2012	12:23:38 PM	Helium valve closed
8/30/2012	12:23:38 PM	H2 valve closed
8/30/2012	12:23:38 PM	BCl3 valve closed
8/30/2012	12:23:38 PM	PH3 valve closed
8/30/2012	12:23:38 PM	SiCl4 pre valve closed
8/30/2012	12:23:38 PM	SiCl4 post valve closed
8/30/2012	12:23:38 PM	Bypass valve closed
8/30/2012	12:23:38 PM	Bubbler valve closed
8/30/2012	12:23:38 PM	Main Vac valve opened
8/30/2012	12:23:38 PM	Helium MFC set to  0.000000
8/30/2012	12:23:38 PM	H2 MFC set to  0.000000
8/30/2012	12:23:38 PM	BCl3 MFC set to  0.000000
8/30/2012	12:23:38 PM	PH3 MFC set to  0.000000
8/30/2012	12:23:38 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:23:38 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:23:38 PM	Tube furnace set to 200
8/30/2012	12:24:08 PM	H2 valve closed
8/30/2012	12:24:08 PM	BCl3 valve closed
8/30/2012	12:24:08 PM	PH3 valve closed
8/30/2012	12:24:08 PM	SiCl4 pre valve closed
8/30/2012	12:24:08 PM	SiCl4 post valve closed
8/30/2012	12:24:08 PM	Bypass valve closed
8/30/2012	12:24:08 PM	Bubbler valve closed
8/30/2012	12:24:08 PM	Helium valve opened
8/30/2012	12:24:08 PM	Main Vac valve opened
8/30/2012	12:24:08 PM	Helium MFC set to  20.000000
8/30/2012	12:24:08 PM	H2 MFC set to  0.000000
8/30/2012	12:24:08 PM	BCl3 MFC set to  0.000000
8/30/2012	12:24:08 PM	PH3 MFC set to  0.000000
8/30/2012	12:24:08 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:24:08 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:24:08 PM	Tube furnace set to 200
8/30/2012	12:24:38 PM	Helium valve closed
8/30/2012	12:24:38 PM	H2 valve closed
8/30/2012	12:24:38 PM	BCl3 valve closed
8/30/2012	12:24:38 PM	PH3 valve closed
8/30/2012	12:24:38 PM	SiCl4 pre valve closed
8/30/2012	12:24:38 PM	SiCl4 post valve closed
8/30/2012	12:24:38 PM	Bypass valve closed
8/30/2012	12:24:38 PM	Bubbler valve closed
8/30/2012	12:24:38 PM	Main Vac valve opened
8/30/2012	12:24:39 PM	Helium MFC set to  0.000000
8/30/2012	12:24:39 PM	H2 MFC set to  0.000000
8/30/2012	12:24:39 PM	BCl3 MFC set to  0.000000
8/30/2012	12:24:39 PM	PH3 MFC set to  0.000000
8/30/2012	12:24:39 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:24:39 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:24:39 PM	Tube furnace set to 200
8/30/2012	12:25:09 PM	H2 valve closed
8/30/2012	12:25:09 PM	BCl3 valve closed
8/30/2012	12:25:09 PM	PH3 valve closed
8/30/2012	12:25:09 PM	SiCl4 pre valve closed
8/30/2012	12:25:09 PM	SiCl4 post valve closed
8/30/2012	12:25:09 PM	Bypass valve closed
8/30/2012	12:25:09 PM	Bubbler valve closed
8/30/2012	12:25:09 PM	Helium valve opened
8/30/2012	12:25:09 PM	Main Vac valve opened
8/30/2012	12:25:09 PM	Helium MFC set to  20.000000
8/30/2012	12:25:09 PM	H2 MFC set to  0.000000
8/30/2012	12:25:09 PM	BCl3 MFC set to  0.000000
8/30/2012	12:25:09 PM	PH3 MFC set to  0.000000
8/30/2012	12:25:09 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:25:09 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:25:09 PM	Tube furnace set to 200
8/30/2012	12:25:39 PM	Helium valve closed
8/30/2012	12:25:39 PM	H2 valve closed
8/30/2012	12:25:39 PM	BCl3 valve closed
8/30/2012	12:25:39 PM	PH3 valve closed
8/30/2012	12:25:39 PM	SiCl4 pre valve closed
8/30/2012	12:25:39 PM	SiCl4 post valve closed
8/30/2012	12:25:39 PM	Bypass valve closed
8/30/2012	12:25:39 PM	Bubbler valve closed
8/30/2012	12:25:39 PM	Main Vac valve opened
8/30/2012	12:25:39 PM	Helium MFC set to  0.000000
8/30/2012	12:25:39 PM	H2 MFC set to  0.000000
8/30/2012	12:25:39 PM	BCl3 MFC set to  0.000000
8/30/2012	12:25:39 PM	PH3 MFC set to  0.000000
8/30/2012	12:25:39 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:25:39 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:25:39 PM	Tube furnace set to 0
8/30/2012	12:25:40 PM	Run finished at 12:25 PM
8/30/2012	12:40:22 PM	Recipe started at 12:40 PM
8/30/2012	12:40:22 PM	Helium valve closed
8/30/2012	12:40:22 PM	H2 valve closed
8/30/2012	12:40:22 PM	BCl3 valve closed
8/30/2012	12:40:22 PM	PH3 valve closed
8/30/2012	12:40:22 PM	SiCl4 pre valve closed
8/30/2012	12:40:22 PM	SiCl4 post valve closed
8/30/2012	12:40:22 PM	Bypass valve closed
8/30/2012	12:40:22 PM	Bubbler valve closed
8/30/2012	12:40:22 PM	Main Vac valve opened
8/30/2012	12:40:22 PM	Helium MFC set to  0.000000
8/30/2012	12:40:22 PM	H2 MFC set to  0.000000
8/30/2012	12:40:22 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:22 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:22 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:22 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:22 PM	Tube furnace set to 0
8/30/2012	12:40:24 PM	H2 valve closed
8/30/2012	12:40:24 PM	BCl3 valve closed
8/30/2012	12:40:24 PM	PH3 valve closed
8/30/2012	12:40:24 PM	SiCl4 pre valve closed
8/30/2012	12:40:24 PM	SiCl4 post valve closed
8/30/2012	12:40:24 PM	Bypass valve closed
8/30/2012	12:40:24 PM	Bubbler valve closed
8/30/2012	12:40:24 PM	Helium valve opened
8/30/2012	12:40:24 PM	Main Vac valve opened
8/30/2012	12:40:24 PM	Helium MFC set to  20.000000
8/30/2012	12:40:24 PM	H2 MFC set to  0.000000
8/30/2012	12:40:25 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:25 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:25 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:25 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:25 PM	Tube furnace set to 0
8/30/2012	12:40:25 PM	Helium valve closed
8/30/2012	12:40:25 PM	H2 valve closed
8/30/2012	12:40:25 PM	BCl3 valve closed
8/30/2012	12:40:25 PM	PH3 valve closed
8/30/2012	12:40:25 PM	SiCl4 pre valve closed
8/30/2012	12:40:25 PM	SiCl4 post valve closed
8/30/2012	12:40:25 PM	Bypass valve closed
8/30/2012	12:40:25 PM	Bubbler valve closed
8/30/2012	12:40:25 PM	Main Vac valve opened
8/30/2012	12:40:25 PM	Helium MFC set to  0.000000
8/30/2012	12:40:25 PM	H2 MFC set to  0.000000
8/30/2012	12:40:25 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:25 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:25 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:25 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:25 PM	Tube furnace set to 0
8/30/2012	12:40:26 PM	H2 valve closed
8/30/2012	12:40:26 PM	BCl3 valve closed
8/30/2012	12:40:26 PM	PH3 valve closed
8/30/2012	12:40:26 PM	SiCl4 pre valve closed
8/30/2012	12:40:26 PM	SiCl4 post valve closed
8/30/2012	12:40:26 PM	Bypass valve closed
8/30/2012	12:40:26 PM	Bubbler valve closed
8/30/2012	12:40:26 PM	Helium valve opened
8/30/2012	12:40:26 PM	Main Vac valve opened
8/30/2012	12:40:26 PM	Helium MFC set to  20.000000
8/30/2012	12:40:26 PM	H2 MFC set to  0.000000
8/30/2012	12:40:26 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:26 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:26 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:26 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:26 PM	Tube furnace set to 0
8/30/2012	12:40:26 PM	Helium valve closed
8/30/2012	12:40:26 PM	H2 valve closed
8/30/2012	12:40:26 PM	BCl3 valve closed
8/30/2012	12:40:26 PM	PH3 valve closed
8/30/2012	12:40:26 PM	SiCl4 pre valve closed
8/30/2012	12:40:26 PM	SiCl4 post valve closed
8/30/2012	12:40:26 PM	Bypass valve closed
8/30/2012	12:40:26 PM	Bubbler valve closed
8/30/2012	12:40:26 PM	Main Vac valve opened
8/30/2012	12:40:26 PM	Helium MFC set to  0.000000
8/30/2012	12:40:26 PM	H2 MFC set to  0.000000
8/30/2012	12:40:26 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:26 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:26 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:26 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:27 PM	Tube furnace set to 0
8/30/2012	12:40:27 PM	H2 valve closed
8/30/2012	12:40:27 PM	BCl3 valve closed
8/30/2012	12:40:27 PM	PH3 valve closed
8/30/2012	12:40:27 PM	SiCl4 pre valve closed
8/30/2012	12:40:27 PM	SiCl4 post valve closed
8/30/2012	12:40:27 PM	Bypass valve closed
8/30/2012	12:40:27 PM	Bubbler valve closed
8/30/2012	12:40:27 PM	Helium valve opened
8/30/2012	12:40:27 PM	Main Vac valve opened
8/30/2012	12:40:27 PM	Helium MFC set to  20.000000
8/30/2012	12:40:27 PM	H2 MFC set to  0.000000
8/30/2012	12:40:27 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:27 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:27 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:27 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:27 PM	Tube furnace set to 0
8/30/2012	12:40:28 PM	Helium valve closed
8/30/2012	12:40:28 PM	H2 valve closed
8/30/2012	12:40:28 PM	BCl3 valve closed
8/30/2012	12:40:28 PM	PH3 valve closed
8/30/2012	12:40:28 PM	SiCl4 pre valve closed
8/30/2012	12:40:28 PM	SiCl4 post valve closed
8/30/2012	12:40:28 PM	Bypass valve closed
8/30/2012	12:40:28 PM	Bubbler valve closed
8/30/2012	12:40:28 PM	Main Vac valve opened
8/30/2012	12:40:28 PM	Helium MFC set to  0.000000
8/30/2012	12:40:28 PM	H2 MFC set to  0.000000
8/30/2012	12:40:28 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:28 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:28 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:28 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:28 PM	Tube furnace set to 0
8/30/2012	12:40:29 PM	H2 valve closed
8/30/2012	12:40:29 PM	BCl3 valve closed
8/30/2012	12:40:29 PM	PH3 valve closed
8/30/2012	12:40:29 PM	SiCl4 pre valve closed
8/30/2012	12:40:29 PM	SiCl4 post valve closed
8/30/2012	12:40:29 PM	Bypass valve closed
8/30/2012	12:40:29 PM	Bubbler valve closed
8/30/2012	12:40:29 PM	Helium valve opened
8/30/2012	12:40:29 PM	Main Vac valve opened
8/30/2012	12:40:29 PM	Helium MFC set to  20.000000
8/30/2012	12:40:29 PM	H2 MFC set to  0.000000
8/30/2012	12:40:29 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:29 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:29 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:29 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:29 PM	Tube furnace set to 0
8/30/2012	12:40:30 PM	Helium valve closed
8/30/2012	12:40:30 PM	H2 valve closed
8/30/2012	12:40:30 PM	BCl3 valve closed
8/30/2012	12:40:30 PM	PH3 valve closed
8/30/2012	12:40:30 PM	SiCl4 pre valve closed
8/30/2012	12:40:30 PM	SiCl4 post valve closed
8/30/2012	12:40:30 PM	Bypass valve closed
8/30/2012	12:40:30 PM	Bubbler valve closed
8/30/2012	12:40:30 PM	Main Vac valve opened
8/30/2012	12:40:30 PM	Helium MFC set to  0.000000
8/30/2012	12:40:30 PM	H2 MFC set to  0.000000
8/30/2012	12:40:30 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:30 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:30 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:30 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:31 PM	Tube furnace set to 0
8/30/2012	12:40:31 PM	H2 valve closed
8/30/2012	12:40:31 PM	BCl3 valve closed
8/30/2012	12:40:31 PM	PH3 valve closed
8/30/2012	12:40:31 PM	SiCl4 pre valve closed
8/30/2012	12:40:31 PM	SiCl4 post valve closed
8/30/2012	12:40:31 PM	Bypass valve closed
8/30/2012	12:40:31 PM	Bubbler valve closed
8/30/2012	12:40:31 PM	Helium valve opened
8/30/2012	12:40:31 PM	Main Vac valve opened
8/30/2012	12:40:31 PM	Helium MFC set to  20.000000
8/30/2012	12:40:31 PM	H2 MFC set to  0.000000
8/30/2012	12:40:31 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:31 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:31 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:31 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:31 PM	Tube furnace set to 0
8/30/2012	12:40:32 PM	Helium valve closed
8/30/2012	12:40:32 PM	H2 valve closed
8/30/2012	12:40:32 PM	BCl3 valve closed
8/30/2012	12:40:32 PM	PH3 valve closed
8/30/2012	12:40:32 PM	SiCl4 pre valve closed
8/30/2012	12:40:32 PM	SiCl4 post valve closed
8/30/2012	12:40:32 PM	Bypass valve closed
8/30/2012	12:40:32 PM	Bubbler valve closed
8/30/2012	12:40:32 PM	Main Vac valve opened
8/30/2012	12:40:32 PM	Helium MFC set to  0.000000
8/30/2012	12:40:32 PM	H2 MFC set to  0.000000
8/30/2012	12:40:32 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:32 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:32 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:32 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:32 PM	Tube furnace set to 0
8/30/2012	12:40:33 PM	H2 valve closed
8/30/2012	12:40:33 PM	BCl3 valve closed
8/30/2012	12:40:33 PM	PH3 valve closed
8/30/2012	12:40:33 PM	SiCl4 pre valve closed
8/30/2012	12:40:33 PM	SiCl4 post valve closed
8/30/2012	12:40:33 PM	Bypass valve closed
8/30/2012	12:40:33 PM	Bubbler valve closed
8/30/2012	12:40:33 PM	Helium valve opened
8/30/2012	12:40:33 PM	Main Vac valve opened
8/30/2012	12:40:33 PM	Helium MFC set to  20.000000
8/30/2012	12:40:33 PM	H2 MFC set to  0.000000
8/30/2012	12:40:33 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:33 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:33 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:33 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:33 PM	Tube furnace set to 0
8/30/2012	12:40:34 PM	Helium valve closed
8/30/2012	12:40:34 PM	H2 valve closed
8/30/2012	12:40:34 PM	BCl3 valve closed
8/30/2012	12:40:34 PM	PH3 valve closed
8/30/2012	12:40:34 PM	SiCl4 pre valve closed
8/30/2012	12:40:34 PM	SiCl4 post valve closed
8/30/2012	12:40:34 PM	Bypass valve closed
8/30/2012	12:40:34 PM	Bubbler valve closed
8/30/2012	12:40:34 PM	Main Vac valve opened
8/30/2012	12:40:34 PM	Helium MFC set to  0.000000
8/30/2012	12:40:34 PM	H2 MFC set to  0.000000
8/30/2012	12:40:34 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:34 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:34 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:34 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:35 PM	Tube furnace set to 0
8/30/2012	12:40:35 PM	H2 valve closed
8/30/2012	12:40:35 PM	BCl3 valve closed
8/30/2012	12:40:35 PM	PH3 valve closed
8/30/2012	12:40:35 PM	SiCl4 pre valve closed
8/30/2012	12:40:35 PM	SiCl4 post valve closed
8/30/2012	12:40:35 PM	Bypass valve closed
8/30/2012	12:40:35 PM	Bubbler valve closed
8/30/2012	12:40:35 PM	Helium valve opened
8/30/2012	12:40:35 PM	Main Vac valve opened
8/30/2012	12:40:35 PM	Helium MFC set to  20.000000
8/30/2012	12:40:35 PM	H2 MFC set to  0.000000
8/30/2012	12:40:35 PM	BCl3 MFC set to  0.000000
8/30/2012	12:40:35 PM	PH3 MFC set to  0.000000
8/30/2012	12:40:35 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:40:35 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:40:35 PM	Tube furnace set to 0
8/30/2012	12:41:05 PM	Helium valve closed
8/30/2012	12:41:05 PM	H2 valve closed
8/30/2012	12:41:05 PM	BCl3 valve closed
8/30/2012	12:41:05 PM	PH3 valve closed
8/30/2012	12:41:05 PM	SiCl4 pre valve closed
8/30/2012	12:41:05 PM	SiCl4 post valve closed
8/30/2012	12:41:05 PM	Bypass valve closed
8/30/2012	12:41:05 PM	Bubbler valve closed
8/30/2012	12:41:05 PM	Main Vac valve opened
8/30/2012	12:41:05 PM	Helium MFC set to  0.000000
8/30/2012	12:41:05 PM	H2 MFC set to  0.000000
8/30/2012	12:41:05 PM	BCl3 MFC set to  0.000000
8/30/2012	12:41:05 PM	PH3 MFC set to  0.000000
8/30/2012	12:41:05 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:41:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:41:05 PM	Tube furnace set to 0
8/30/2012	12:41:36 PM	H2 valve closed
8/30/2012	12:41:36 PM	BCl3 valve closed
8/30/2012	12:41:36 PM	PH3 valve closed
8/30/2012	12:41:36 PM	SiCl4 pre valve closed
8/30/2012	12:41:36 PM	SiCl4 post valve closed
8/30/2012	12:41:36 PM	Bypass valve closed
8/30/2012	12:41:36 PM	Bubbler valve closed
8/30/2012	12:41:36 PM	Helium valve opened
8/30/2012	12:41:36 PM	Main Vac valve opened
8/30/2012	12:41:36 PM	Helium MFC set to  20.000000
8/30/2012	12:41:36 PM	H2 MFC set to  0.000000
8/30/2012	12:41:36 PM	BCl3 MFC set to  0.000000
8/30/2012	12:41:36 PM	PH3 MFC set to  0.000000
8/30/2012	12:41:36 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:41:36 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:41:36 PM	Tube furnace set to 0
8/30/2012	12:42:06 PM	Helium valve closed
8/30/2012	12:42:06 PM	H2 valve closed
8/30/2012	12:42:06 PM	BCl3 valve closed
8/30/2012	12:42:06 PM	PH3 valve closed
8/30/2012	12:42:06 PM	SiCl4 pre valve closed
8/30/2012	12:42:06 PM	SiCl4 post valve closed
8/30/2012	12:42:06 PM	Bypass valve closed
8/30/2012	12:42:06 PM	Bubbler valve closed
8/30/2012	12:42:06 PM	Main Vac valve opened
8/30/2012	12:42:06 PM	Helium MFC set to  0.000000
8/30/2012	12:42:06 PM	H2 MFC set to  0.000000
8/30/2012	12:42:06 PM	BCl3 MFC set to  0.000000
8/30/2012	12:42:06 PM	PH3 MFC set to  0.000000
8/30/2012	12:42:06 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:42:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:42:06 PM	Tube furnace set to 0
8/30/2012	12:42:36 PM	H2 valve closed
8/30/2012	12:42:36 PM	BCl3 valve closed
8/30/2012	12:42:36 PM	PH3 valve closed
8/30/2012	12:42:36 PM	SiCl4 pre valve closed
8/30/2012	12:42:36 PM	SiCl4 post valve closed
8/30/2012	12:42:36 PM	Bypass valve closed
8/30/2012	12:42:36 PM	Bubbler valve closed
8/30/2012	12:42:36 PM	Helium valve opened
8/30/2012	12:42:36 PM	Main Vac valve opened
8/30/2012	12:42:36 PM	Helium MFC set to  20.000000
8/30/2012	12:42:36 PM	H2 MFC set to  0.000000
8/30/2012	12:42:36 PM	BCl3 MFC set to  0.000000
8/30/2012	12:42:36 PM	PH3 MFC set to  0.000000
8/30/2012	12:42:36 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:42:36 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:42:36 PM	Tube furnace set to 0
8/30/2012	12:43:06 PM	Helium valve closed
8/30/2012	12:43:06 PM	H2 valve closed
8/30/2012	12:43:06 PM	BCl3 valve closed
8/30/2012	12:43:06 PM	PH3 valve closed
8/30/2012	12:43:06 PM	SiCl4 pre valve closed
8/30/2012	12:43:06 PM	SiCl4 post valve closed
8/30/2012	12:43:06 PM	Bypass valve closed
8/30/2012	12:43:06 PM	Bubbler valve closed
8/30/2012	12:43:06 PM	Main Vac valve opened
8/30/2012	12:43:06 PM	Helium MFC set to  0.000000
8/30/2012	12:43:06 PM	H2 MFC set to  0.000000
8/30/2012	12:43:06 PM	BCl3 MFC set to  0.000000
8/30/2012	12:43:06 PM	PH3 MFC set to  0.000000
8/30/2012	12:43:06 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:43:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:43:06 PM	Tube furnace set to 200
8/30/2012	12:43:36 PM	H2 valve closed
8/30/2012	12:43:36 PM	BCl3 valve closed
8/30/2012	12:43:36 PM	PH3 valve closed
8/30/2012	12:43:36 PM	SiCl4 pre valve closed
8/30/2012	12:43:36 PM	SiCl4 post valve closed
8/30/2012	12:43:36 PM	Bypass valve closed
8/30/2012	12:43:36 PM	Bubbler valve closed
8/30/2012	12:43:36 PM	Helium valve opened
8/30/2012	12:43:36 PM	Main Vac valve opened
8/30/2012	12:43:36 PM	Helium MFC set to  20.000000
8/30/2012	12:43:36 PM	H2 MFC set to  0.000000
8/30/2012	12:43:37 PM	BCl3 MFC set to  0.000000
8/30/2012	12:43:37 PM	PH3 MFC set to  0.000000
8/30/2012	12:43:37 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:43:37 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:43:37 PM	Tube furnace set to 200
8/30/2012	12:44:07 PM	Helium valve closed
8/30/2012	12:44:07 PM	H2 valve closed
8/30/2012	12:44:07 PM	BCl3 valve closed
8/30/2012	12:44:07 PM	PH3 valve closed
8/30/2012	12:44:07 PM	SiCl4 pre valve closed
8/30/2012	12:44:07 PM	SiCl4 post valve closed
8/30/2012	12:44:07 PM	Bypass valve closed
8/30/2012	12:44:07 PM	Bubbler valve closed
8/30/2012	12:44:07 PM	Main Vac valve opened
8/30/2012	12:44:07 PM	Helium MFC set to  0.000000
8/30/2012	12:44:07 PM	H2 MFC set to  0.000000
8/30/2012	12:44:07 PM	BCl3 MFC set to  0.000000
8/30/2012	12:44:07 PM	PH3 MFC set to  0.000000
8/30/2012	12:44:07 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:44:07 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:44:07 PM	Tube furnace set to 200
8/30/2012	12:44:37 PM	H2 valve closed
8/30/2012	12:44:37 PM	BCl3 valve closed
8/30/2012	12:44:37 PM	PH3 valve closed
8/30/2012	12:44:37 PM	SiCl4 pre valve closed
8/30/2012	12:44:37 PM	SiCl4 post valve closed
8/30/2012	12:44:37 PM	Bypass valve closed
8/30/2012	12:44:37 PM	Bubbler valve closed
8/30/2012	12:44:37 PM	Helium valve opened
8/30/2012	12:44:37 PM	Main Vac valve opened
8/30/2012	12:44:37 PM	Helium MFC set to  20.000000
8/30/2012	12:44:37 PM	H2 MFC set to  0.000000
8/30/2012	12:44:37 PM	BCl3 MFC set to  0.000000
8/30/2012	12:44:37 PM	PH3 MFC set to  0.000000
8/30/2012	12:44:37 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:44:37 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:44:37 PM	Tube furnace set to 200
8/30/2012	12:45:07 PM	Helium valve closed
8/30/2012	12:45:07 PM	H2 valve closed
8/30/2012	12:45:07 PM	BCl3 valve closed
8/30/2012	12:45:07 PM	PH3 valve closed
8/30/2012	12:45:07 PM	SiCl4 pre valve closed
8/30/2012	12:45:07 PM	SiCl4 post valve closed
8/30/2012	12:45:07 PM	Bypass valve closed
8/30/2012	12:45:07 PM	Bubbler valve closed
8/30/2012	12:45:07 PM	Main Vac valve opened
8/30/2012	12:45:07 PM	Helium MFC set to  0.000000
8/30/2012	12:45:07 PM	H2 MFC set to  0.000000
8/30/2012	12:45:07 PM	BCl3 MFC set to  0.000000
8/30/2012	12:45:07 PM	PH3 MFC set to  0.000000
8/30/2012	12:45:07 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:45:07 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:45:07 PM	Tube furnace set to 200
8/30/2012	12:45:37 PM	H2 valve closed
8/30/2012	12:45:37 PM	BCl3 valve closed
8/30/2012	12:45:37 PM	PH3 valve closed
8/30/2012	12:45:37 PM	SiCl4 pre valve closed
8/30/2012	12:45:37 PM	SiCl4 post valve closed
8/30/2012	12:45:37 PM	Bypass valve closed
8/30/2012	12:45:37 PM	Bubbler valve closed
8/30/2012	12:45:37 PM	Helium valve opened
8/30/2012	12:45:37 PM	Main Vac valve opened
8/30/2012	12:45:37 PM	Helium MFC set to  20.000000
8/30/2012	12:45:37 PM	H2 MFC set to  0.000000
8/30/2012	12:45:37 PM	BCl3 MFC set to  0.000000
8/30/2012	12:45:37 PM	PH3 MFC set to  0.000000
8/30/2012	12:45:37 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:45:37 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:45:38 PM	Tube furnace set to 200
8/30/2012	12:46:08 PM	Helium valve closed
8/30/2012	12:46:08 PM	H2 valve closed
8/30/2012	12:46:08 PM	BCl3 valve closed
8/30/2012	12:46:08 PM	PH3 valve closed
8/30/2012	12:46:08 PM	SiCl4 pre valve closed
8/30/2012	12:46:08 PM	SiCl4 post valve closed
8/30/2012	12:46:08 PM	Bypass valve closed
8/30/2012	12:46:08 PM	Bubbler valve closed
8/30/2012	12:46:08 PM	Main Vac valve opened
8/30/2012	12:46:08 PM	Helium MFC set to  0.000000
8/30/2012	12:46:08 PM	H2 MFC set to  0.000000
8/30/2012	12:46:08 PM	BCl3 MFC set to  0.000000
8/30/2012	12:46:08 PM	PH3 MFC set to  0.000000
8/30/2012	12:46:08 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:46:08 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:46:08 PM	Tube furnace set to 200
8/30/2012	12:46:38 PM	H2 valve closed
8/30/2012	12:46:38 PM	BCl3 valve closed
8/30/2012	12:46:38 PM	PH3 valve closed
8/30/2012	12:46:38 PM	SiCl4 pre valve closed
8/30/2012	12:46:38 PM	SiCl4 post valve closed
8/30/2012	12:46:38 PM	Bypass valve closed
8/30/2012	12:46:38 PM	Bubbler valve closed
8/30/2012	12:46:38 PM	Helium valve opened
8/30/2012	12:46:38 PM	Main Vac valve opened
8/30/2012	12:46:38 PM	Helium MFC set to  20.000000
8/30/2012	12:46:38 PM	H2 MFC set to  0.000000
8/30/2012	12:46:38 PM	BCl3 MFC set to  0.000000
8/30/2012	12:46:38 PM	PH3 MFC set to  0.000000
8/30/2012	12:46:38 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:46:38 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:46:38 PM	Tube furnace set to 200
8/30/2012	12:47:08 PM	Helium valve closed
8/30/2012	12:47:08 PM	H2 valve closed
8/30/2012	12:47:08 PM	BCl3 valve closed
8/30/2012	12:47:08 PM	PH3 valve closed
8/30/2012	12:47:08 PM	SiCl4 pre valve closed
8/30/2012	12:47:08 PM	SiCl4 post valve closed
8/30/2012	12:47:08 PM	Bypass valve closed
8/30/2012	12:47:08 PM	Bubbler valve closed
8/30/2012	12:47:08 PM	Main Vac valve opened
8/30/2012	12:47:08 PM	Helium MFC set to  0.000000
8/30/2012	12:47:08 PM	H2 MFC set to  0.000000
8/30/2012	12:47:08 PM	BCl3 MFC set to  0.000000
8/30/2012	12:47:08 PM	PH3 MFC set to  0.000000
8/30/2012	12:47:08 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:47:08 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:47:08 PM	Tube furnace set to 200
8/30/2012	12:47:38 PM	H2 valve closed
8/30/2012	12:47:38 PM	BCl3 valve closed
8/30/2012	12:47:38 PM	PH3 valve closed
8/30/2012	12:47:38 PM	SiCl4 pre valve closed
8/30/2012	12:47:38 PM	SiCl4 post valve closed
8/30/2012	12:47:38 PM	Bypass valve closed
8/30/2012	12:47:38 PM	Bubbler valve closed
8/30/2012	12:47:38 PM	Helium valve opened
8/30/2012	12:47:38 PM	Main Vac valve opened
8/30/2012	12:47:38 PM	Helium MFC set to  20.000000
8/30/2012	12:47:38 PM	H2 MFC set to  0.000000
8/30/2012	12:47:38 PM	BCl3 MFC set to  0.000000
8/30/2012	12:47:38 PM	PH3 MFC set to  0.000000
8/30/2012	12:47:38 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:47:38 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:47:39 PM	Tube furnace set to 200
8/30/2012	12:48:09 PM	Helium valve closed
8/30/2012	12:48:09 PM	H2 valve closed
8/30/2012	12:48:09 PM	BCl3 valve closed
8/30/2012	12:48:09 PM	PH3 valve closed
8/30/2012	12:48:09 PM	SiCl4 pre valve closed
8/30/2012	12:48:09 PM	SiCl4 post valve closed
8/30/2012	12:48:09 PM	Bypass valve closed
8/30/2012	12:48:09 PM	Bubbler valve closed
8/30/2012	12:48:09 PM	Main Vac valve opened
8/30/2012	12:48:09 PM	Helium MFC set to  0.000000
8/30/2012	12:48:09 PM	H2 MFC set to  0.000000
8/30/2012	12:48:09 PM	BCl3 MFC set to  0.000000
8/30/2012	12:48:09 PM	PH3 MFC set to  0.000000
8/30/2012	12:48:09 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:48:09 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:48:09 PM	Tube furnace set to 200
8/30/2012	12:48:39 PM	H2 valve closed
8/30/2012	12:48:39 PM	BCl3 valve closed
8/30/2012	12:48:39 PM	PH3 valve closed
8/30/2012	12:48:39 PM	SiCl4 pre valve closed
8/30/2012	12:48:39 PM	SiCl4 post valve closed
8/30/2012	12:48:39 PM	Bypass valve closed
8/30/2012	12:48:39 PM	Bubbler valve closed
8/30/2012	12:48:39 PM	Helium valve opened
8/30/2012	12:48:39 PM	Main Vac valve opened
8/30/2012	12:48:39 PM	Helium MFC set to  20.000000
8/30/2012	12:48:39 PM	H2 MFC set to  0.000000
8/30/2012	12:48:39 PM	BCl3 MFC set to  0.000000
8/30/2012	12:48:39 PM	PH3 MFC set to  0.000000
8/30/2012	12:48:39 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:48:39 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:48:39 PM	Tube furnace set to 200
8/30/2012	12:49:09 PM	Helium valve closed
8/30/2012	12:49:09 PM	H2 valve closed
8/30/2012	12:49:09 PM	BCl3 valve closed
8/30/2012	12:49:09 PM	PH3 valve closed
8/30/2012	12:49:09 PM	SiCl4 pre valve closed
8/30/2012	12:49:09 PM	SiCl4 post valve closed
8/30/2012	12:49:09 PM	Bypass valve closed
8/30/2012	12:49:09 PM	Bubbler valve closed
8/30/2012	12:49:09 PM	Main Vac valve opened
8/30/2012	12:49:09 PM	Helium MFC set to  0.000000
8/30/2012	12:49:09 PM	H2 MFC set to  0.000000
8/30/2012	12:49:09 PM	BCl3 MFC set to  0.000000
8/30/2012	12:49:09 PM	PH3 MFC set to  0.000000
8/30/2012	12:49:09 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:49:09 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:49:09 PM	Tube furnace set to 0
8/30/2012	12:49:10 PM	Run finished at 12:49 PM
8/30/2012	12:55:13 PM	Main Vac valve closed
8/30/2012	12:55:30 PM	Main Vac valve opened
8/30/2012	12:57:15 PM	Recipe started at 12:57 PM
8/30/2012	12:57:15 PM	Helium valve closed
8/30/2012	12:57:15 PM	H2 valve closed
8/30/2012	12:57:15 PM	BCl3 valve closed
8/30/2012	12:57:15 PM	PH3 valve closed
8/30/2012	12:57:15 PM	SiCl4 pre valve closed
8/30/2012	12:57:15 PM	SiCl4 post valve closed
8/30/2012	12:57:15 PM	Bypass valve closed
8/30/2012	12:57:15 PM	Bubbler valve closed
8/30/2012	12:57:15 PM	Main Vac valve opened
8/30/2012	12:57:15 PM	Helium MFC set to  0.000000
8/30/2012	12:57:15 PM	H2 MFC set to  0.000000
8/30/2012	12:57:15 PM	BCl3 MFC set to  0.000000
8/30/2012	12:57:15 PM	PH3 MFC set to  0.000000
8/30/2012	12:57:15 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:57:15 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:57:15 PM	Tube furnace set to 0
8/30/2012	12:57:45 PM	H2 valve closed
8/30/2012	12:57:45 PM	BCl3 valve closed
8/30/2012	12:57:45 PM	PH3 valve closed
8/30/2012	12:57:45 PM	SiCl4 pre valve closed
8/30/2012	12:57:45 PM	SiCl4 post valve closed
8/30/2012	12:57:45 PM	Bypass valve closed
8/30/2012	12:57:45 PM	Bubbler valve closed
8/30/2012	12:57:45 PM	Helium valve opened
8/30/2012	12:57:45 PM	Main Vac valve opened
8/30/2012	12:57:45 PM	Helium MFC set to  20.000000
8/30/2012	12:57:45 PM	H2 MFC set to  0.000000
8/30/2012	12:57:45 PM	BCl3 MFC set to  0.000000
8/30/2012	12:57:45 PM	PH3 MFC set to  0.000000
8/30/2012	12:57:45 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:57:45 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:57:45 PM	Tube furnace set to 0
8/30/2012	12:58:15 PM	Helium valve closed
8/30/2012	12:58:15 PM	H2 valve closed
8/30/2012	12:58:15 PM	BCl3 valve closed
8/30/2012	12:58:15 PM	PH3 valve closed
8/30/2012	12:58:15 PM	SiCl4 pre valve closed
8/30/2012	12:58:15 PM	SiCl4 post valve closed
8/30/2012	12:58:15 PM	Bypass valve closed
8/30/2012	12:58:15 PM	Bubbler valve closed
8/30/2012	12:58:15 PM	Main Vac valve opened
8/30/2012	12:58:15 PM	Helium MFC set to  0.000000
8/30/2012	12:58:15 PM	H2 MFC set to  0.000000
8/30/2012	12:58:15 PM	BCl3 MFC set to  0.000000
8/30/2012	12:58:15 PM	PH3 MFC set to  0.000000
8/30/2012	12:58:15 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:58:15 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:58:16 PM	Tube furnace set to 0
8/30/2012	12:58:46 PM	H2 valve closed
8/30/2012	12:58:46 PM	BCl3 valve closed
8/30/2012	12:58:46 PM	PH3 valve closed
8/30/2012	12:58:46 PM	SiCl4 pre valve closed
8/30/2012	12:58:46 PM	SiCl4 post valve closed
8/30/2012	12:58:46 PM	Bypass valve closed
8/30/2012	12:58:46 PM	Bubbler valve closed
8/30/2012	12:58:46 PM	Helium valve opened
8/30/2012	12:58:46 PM	Main Vac valve opened
8/30/2012	12:58:46 PM	Helium MFC set to  20.000000
8/30/2012	12:58:46 PM	H2 MFC set to  0.000000
8/30/2012	12:58:46 PM	BCl3 MFC set to  0.000000
8/30/2012	12:58:46 PM	PH3 MFC set to  0.000000
8/30/2012	12:58:46 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:58:46 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:58:46 PM	Tube furnace set to 0
8/30/2012	12:59:16 PM	Helium valve closed
8/30/2012	12:59:16 PM	H2 valve closed
8/30/2012	12:59:16 PM	BCl3 valve closed
8/30/2012	12:59:16 PM	PH3 valve closed
8/30/2012	12:59:16 PM	SiCl4 pre valve closed
8/30/2012	12:59:16 PM	SiCl4 post valve closed
8/30/2012	12:59:16 PM	Bypass valve closed
8/30/2012	12:59:16 PM	Bubbler valve closed
8/30/2012	12:59:16 PM	Main Vac valve opened
8/30/2012	12:59:16 PM	Helium MFC set to  0.000000
8/30/2012	12:59:16 PM	H2 MFC set to  0.000000
8/30/2012	12:59:16 PM	BCl3 MFC set to  0.000000
8/30/2012	12:59:16 PM	PH3 MFC set to  0.000000
8/30/2012	12:59:16 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:59:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:59:16 PM	Tube furnace set to 0
8/30/2012	12:59:46 PM	H2 valve closed
8/30/2012	12:59:46 PM	BCl3 valve closed
8/30/2012	12:59:46 PM	PH3 valve closed
8/30/2012	12:59:46 PM	SiCl4 pre valve closed
8/30/2012	12:59:46 PM	SiCl4 post valve closed
8/30/2012	12:59:46 PM	Bypass valve closed
8/30/2012	12:59:46 PM	Bubbler valve closed
8/30/2012	12:59:46 PM	Helium valve opened
8/30/2012	12:59:46 PM	Main Vac valve opened
8/30/2012	12:59:46 PM	Helium MFC set to  20.000000
8/30/2012	12:59:46 PM	H2 MFC set to  0.000000
8/30/2012	12:59:46 PM	BCl3 MFC set to  0.000000
8/30/2012	12:59:46 PM	PH3 MFC set to  0.000000
8/30/2012	12:59:46 PM	SiCl4 MFC set to  0.000000
8/30/2012	12:59:46 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	12:59:46 PM	Tube furnace set to 0
8/30/2012	1:00:16 PM	Helium valve closed
8/30/2012	1:00:16 PM	H2 valve closed
8/30/2012	1:00:16 PM	BCl3 valve closed
8/30/2012	1:00:16 PM	PH3 valve closed
8/30/2012	1:00:16 PM	SiCl4 pre valve closed
8/30/2012	1:00:16 PM	SiCl4 post valve closed
8/30/2012	1:00:16 PM	Bypass valve closed
8/30/2012	1:00:16 PM	Bubbler valve closed
8/30/2012	1:00:16 PM	Main Vac valve opened
8/30/2012	1:00:16 PM	Helium MFC set to  0.000000
8/30/2012	1:00:16 PM	H2 MFC set to  0.000000
8/30/2012	1:00:16 PM	BCl3 MFC set to  0.000000
8/30/2012	1:00:16 PM	PH3 MFC set to  0.000000
8/30/2012	1:00:16 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:00:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:00:17 PM	Tube furnace set to 0
8/30/2012	1:00:47 PM	H2 valve closed
8/30/2012	1:00:47 PM	BCl3 valve closed
8/30/2012	1:00:47 PM	PH3 valve closed
8/30/2012	1:00:47 PM	SiCl4 pre valve closed
8/30/2012	1:00:47 PM	SiCl4 post valve closed
8/30/2012	1:00:47 PM	Bypass valve closed
8/30/2012	1:00:47 PM	Bubbler valve closed
8/30/2012	1:00:47 PM	Helium valve opened
8/30/2012	1:00:47 PM	Main Vac valve opened
8/30/2012	1:00:47 PM	Helium MFC set to  20.000000
8/30/2012	1:00:47 PM	H2 MFC set to  0.000000
8/30/2012	1:00:47 PM	BCl3 MFC set to  0.000000
8/30/2012	1:00:47 PM	PH3 MFC set to  0.000000
8/30/2012	1:00:47 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:00:47 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:00:47 PM	Tube furnace set to 0
8/30/2012	1:01:17 PM	Helium valve closed
8/30/2012	1:01:17 PM	H2 valve closed
8/30/2012	1:01:17 PM	BCl3 valve closed
8/30/2012	1:01:17 PM	PH3 valve closed
8/30/2012	1:01:17 PM	SiCl4 pre valve closed
8/30/2012	1:01:17 PM	SiCl4 post valve closed
8/30/2012	1:01:17 PM	Bypass valve closed
8/30/2012	1:01:17 PM	Bubbler valve closed
8/30/2012	1:01:17 PM	Main Vac valve opened
8/30/2012	1:01:17 PM	Helium MFC set to  0.000000
8/30/2012	1:01:17 PM	H2 MFC set to  0.000000
8/30/2012	1:01:17 PM	BCl3 MFC set to  0.000000
8/30/2012	1:01:17 PM	PH3 MFC set to  0.000000
8/30/2012	1:01:17 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:01:17 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:01:17 PM	Tube furnace set to 0
8/30/2012	1:01:47 PM	H2 valve closed
8/30/2012	1:01:47 PM	BCl3 valve closed
8/30/2012	1:01:47 PM	PH3 valve closed
8/30/2012	1:01:47 PM	SiCl4 pre valve closed
8/30/2012	1:01:47 PM	SiCl4 post valve closed
8/30/2012	1:01:47 PM	Bypass valve closed
8/30/2012	1:01:47 PM	Bubbler valve closed
8/30/2012	1:01:47 PM	Helium valve opened
8/30/2012	1:01:47 PM	Main Vac valve opened
8/30/2012	1:01:47 PM	Helium MFC set to  20.000000
8/30/2012	1:01:47 PM	H2 MFC set to  0.000000
8/30/2012	1:01:47 PM	BCl3 MFC set to  0.000000
8/30/2012	1:01:47 PM	PH3 MFC set to  0.000000
8/30/2012	1:01:47 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:01:47 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:01:47 PM	Tube furnace set to 0
8/30/2012	1:02:17 PM	Helium valve closed
8/30/2012	1:02:17 PM	H2 valve closed
8/30/2012	1:02:17 PM	BCl3 valve closed
8/30/2012	1:02:17 PM	PH3 valve closed
8/30/2012	1:02:17 PM	SiCl4 pre valve closed
8/30/2012	1:02:17 PM	SiCl4 post valve closed
8/30/2012	1:02:17 PM	Bypass valve closed
8/30/2012	1:02:17 PM	Bubbler valve closed
8/30/2012	1:02:17 PM	Main Vac valve opened
8/30/2012	1:02:17 PM	Helium MFC set to  0.000000
8/30/2012	1:02:17 PM	H2 MFC set to  0.000000
8/30/2012	1:02:17 PM	BCl3 MFC set to  0.000000
8/30/2012	1:02:17 PM	PH3 MFC set to  0.000000
8/30/2012	1:02:17 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:02:17 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:02:17 PM	Tube furnace set to 0
8/30/2012	1:02:48 PM	H2 valve closed
8/30/2012	1:02:48 PM	BCl3 valve closed
8/30/2012	1:02:48 PM	PH3 valve closed
8/30/2012	1:02:48 PM	SiCl4 pre valve closed
8/30/2012	1:02:48 PM	SiCl4 post valve closed
8/30/2012	1:02:48 PM	Bypass valve closed
8/30/2012	1:02:48 PM	Bubbler valve closed
8/30/2012	1:02:48 PM	Helium valve opened
8/30/2012	1:02:48 PM	Main Vac valve opened
8/30/2012	1:02:48 PM	Helium MFC set to  20.000000
8/30/2012	1:02:48 PM	H2 MFC set to  0.000000
8/30/2012	1:02:48 PM	BCl3 MFC set to  0.000000
8/30/2012	1:02:48 PM	PH3 MFC set to  0.000000
8/30/2012	1:02:48 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:02:48 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:02:48 PM	Tube furnace set to 0
8/30/2012	1:03:18 PM	Helium valve closed
8/30/2012	1:03:18 PM	H2 valve closed
8/30/2012	1:03:18 PM	BCl3 valve closed
8/30/2012	1:03:18 PM	PH3 valve closed
8/30/2012	1:03:18 PM	SiCl4 pre valve closed
8/30/2012	1:03:18 PM	SiCl4 post valve closed
8/30/2012	1:03:18 PM	Bypass valve closed
8/30/2012	1:03:18 PM	Bubbler valve closed
8/30/2012	1:03:18 PM	Main Vac valve opened
8/30/2012	1:03:18 PM	Helium MFC set to  0.000000
8/30/2012	1:03:18 PM	H2 MFC set to  0.000000
8/30/2012	1:03:18 PM	BCl3 MFC set to  0.000000
8/30/2012	1:03:18 PM	PH3 MFC set to  0.000000
8/30/2012	1:03:18 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:03:18 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:03:18 PM	Tube furnace set to 0
8/30/2012	1:03:48 PM	H2 valve closed
8/30/2012	1:03:48 PM	BCl3 valve closed
8/30/2012	1:03:48 PM	PH3 valve closed
8/30/2012	1:03:48 PM	SiCl4 pre valve closed
8/30/2012	1:03:48 PM	SiCl4 post valve closed
8/30/2012	1:03:48 PM	Bypass valve closed
8/30/2012	1:03:48 PM	Bubbler valve closed
8/30/2012	1:03:48 PM	Helium valve opened
8/30/2012	1:03:48 PM	Main Vac valve opened
8/30/2012	1:03:48 PM	Helium MFC set to  20.000000
8/30/2012	1:03:48 PM	H2 MFC set to  0.000000
8/30/2012	1:03:48 PM	BCl3 MFC set to  0.000000
8/30/2012	1:03:48 PM	PH3 MFC set to  0.000000
8/30/2012	1:03:48 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:03:48 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:03:48 PM	Tube furnace set to 0
8/30/2012	1:04:18 PM	Helium valve closed
8/30/2012	1:04:18 PM	H2 valve closed
8/30/2012	1:04:18 PM	BCl3 valve closed
8/30/2012	1:04:18 PM	PH3 valve closed
8/30/2012	1:04:18 PM	SiCl4 pre valve closed
8/30/2012	1:04:18 PM	SiCl4 post valve closed
8/30/2012	1:04:18 PM	Bypass valve closed
8/30/2012	1:04:18 PM	Bubbler valve closed
8/30/2012	1:04:18 PM	Main Vac valve opened
8/30/2012	1:04:18 PM	Helium MFC set to  0.000000
8/30/2012	1:04:18 PM	H2 MFC set to  0.000000
8/30/2012	1:04:18 PM	BCl3 MFC set to  0.000000
8/30/2012	1:04:18 PM	PH3 MFC set to  0.000000
8/30/2012	1:04:18 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:04:18 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:04:18 PM	Tube furnace set to 0
8/30/2012	1:04:48 PM	H2 valve closed
8/30/2012	1:04:48 PM	BCl3 valve closed
8/30/2012	1:04:48 PM	PH3 valve closed
8/30/2012	1:04:48 PM	SiCl4 pre valve closed
8/30/2012	1:04:48 PM	SiCl4 post valve closed
8/30/2012	1:04:48 PM	Bypass valve closed
8/30/2012	1:04:48 PM	Bubbler valve closed
8/30/2012	1:04:48 PM	Helium valve opened
8/30/2012	1:04:49 PM	Main Vac valve opened
8/30/2012	1:04:49 PM	Helium MFC set to  20.000000
8/30/2012	1:04:49 PM	H2 MFC set to  0.000000
8/30/2012	1:04:49 PM	BCl3 MFC set to  0.000000
8/30/2012	1:04:49 PM	PH3 MFC set to  0.000000
8/30/2012	1:04:49 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:04:49 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:04:49 PM	Tube furnace set to 0
8/30/2012	1:05:19 PM	Helium valve closed
8/30/2012	1:05:19 PM	H2 valve closed
8/30/2012	1:05:19 PM	BCl3 valve closed
8/30/2012	1:05:19 PM	PH3 valve closed
8/30/2012	1:05:19 PM	SiCl4 pre valve closed
8/30/2012	1:05:19 PM	SiCl4 post valve closed
8/30/2012	1:05:19 PM	Bypass valve closed
8/30/2012	1:05:19 PM	Bubbler valve closed
8/30/2012	1:05:19 PM	Main Vac valve opened
8/30/2012	1:05:19 PM	Helium MFC set to  0.000000
8/30/2012	1:05:19 PM	H2 MFC set to  0.000000
8/30/2012	1:05:19 PM	BCl3 MFC set to  0.000000
8/30/2012	1:05:19 PM	PH3 MFC set to  0.000000
8/30/2012	1:05:19 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:05:19 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:05:19 PM	Tube furnace set to 0
8/30/2012	1:05:49 PM	H2 valve closed
8/30/2012	1:05:49 PM	BCl3 valve closed
8/30/2012	1:05:49 PM	PH3 valve closed
8/30/2012	1:05:49 PM	SiCl4 pre valve closed
8/30/2012	1:05:49 PM	SiCl4 post valve closed
8/30/2012	1:05:49 PM	Bypass valve closed
8/30/2012	1:05:49 PM	Bubbler valve closed
8/30/2012	1:05:49 PM	Helium valve opened
8/30/2012	1:05:49 PM	Main Vac valve opened
8/30/2012	1:05:49 PM	Helium MFC set to  20.000000
8/30/2012	1:05:49 PM	H2 MFC set to  0.000000
8/30/2012	1:05:49 PM	BCl3 MFC set to  0.000000
8/30/2012	1:05:49 PM	PH3 MFC set to  0.000000
8/30/2012	1:05:49 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:05:49 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:05:49 PM	Tube furnace set to 0
8/30/2012	1:06:19 PM	Helium valve closed
8/30/2012	1:06:19 PM	H2 valve closed
8/30/2012	1:06:19 PM	BCl3 valve closed
8/30/2012	1:06:19 PM	PH3 valve closed
8/30/2012	1:06:19 PM	SiCl4 pre valve closed
8/30/2012	1:06:19 PM	SiCl4 post valve closed
8/30/2012	1:06:19 PM	Bypass valve closed
8/30/2012	1:06:19 PM	Bubbler valve closed
8/30/2012	1:06:19 PM	Main Vac valve opened
8/30/2012	1:06:19 PM	Helium MFC set to  0.000000
8/30/2012	1:06:19 PM	H2 MFC set to  0.000000
8/30/2012	1:06:19 PM	BCl3 MFC set to  0.000000
8/30/2012	1:06:19 PM	PH3 MFC set to  0.000000
8/30/2012	1:06:19 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:06:19 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:06:19 PM	Tube furnace set to 200
8/30/2012	1:06:49 PM	H2 valve closed
8/30/2012	1:06:49 PM	BCl3 valve closed
8/30/2012	1:06:49 PM	PH3 valve closed
8/30/2012	1:06:49 PM	SiCl4 pre valve closed
8/30/2012	1:06:49 PM	SiCl4 post valve closed
8/30/2012	1:06:49 PM	Bypass valve closed
8/30/2012	1:06:49 PM	Bubbler valve closed
8/30/2012	1:06:49 PM	Helium valve opened
8/30/2012	1:06:49 PM	Main Vac valve opened
8/30/2012	1:06:49 PM	Helium MFC set to  20.000000
8/30/2012	1:06:49 PM	H2 MFC set to  0.000000
8/30/2012	1:06:49 PM	BCl3 MFC set to  0.000000
8/30/2012	1:06:49 PM	PH3 MFC set to  0.000000
8/30/2012	1:06:49 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:06:49 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:06:50 PM	Tube furnace set to 200
8/30/2012	1:07:20 PM	Helium valve closed
8/30/2012	1:07:20 PM	H2 valve closed
8/30/2012	1:07:20 PM	BCl3 valve closed
8/30/2012	1:07:20 PM	PH3 valve closed
8/30/2012	1:07:20 PM	SiCl4 pre valve closed
8/30/2012	1:07:20 PM	SiCl4 post valve closed
8/30/2012	1:07:20 PM	Bypass valve closed
8/30/2012	1:07:20 PM	Bubbler valve closed
8/30/2012	1:07:20 PM	Main Vac valve opened
8/30/2012	1:07:20 PM	Helium MFC set to  0.000000
8/30/2012	1:07:20 PM	H2 MFC set to  0.000000
8/30/2012	1:07:20 PM	BCl3 MFC set to  0.000000
8/30/2012	1:07:20 PM	PH3 MFC set to  0.000000
8/30/2012	1:07:20 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:07:20 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:07:20 PM	Tube furnace set to 200
8/30/2012	1:07:50 PM	H2 valve closed
8/30/2012	1:07:50 PM	BCl3 valve closed
8/30/2012	1:07:50 PM	PH3 valve closed
8/30/2012	1:07:50 PM	SiCl4 pre valve closed
8/30/2012	1:07:50 PM	SiCl4 post valve closed
8/30/2012	1:07:50 PM	Bypass valve closed
8/30/2012	1:07:50 PM	Bubbler valve closed
8/30/2012	1:07:50 PM	Helium valve opened
8/30/2012	1:07:50 PM	Main Vac valve opened
8/30/2012	1:07:50 PM	Helium MFC set to  20.000000
8/30/2012	1:07:50 PM	H2 MFC set to  0.000000
8/30/2012	1:07:50 PM	BCl3 MFC set to  0.000000
8/30/2012	1:07:50 PM	PH3 MFC set to  0.000000
8/30/2012	1:07:50 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:07:50 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:07:50 PM	Tube furnace set to 200
8/30/2012	1:08:20 PM	Helium valve closed
8/30/2012	1:08:20 PM	H2 valve closed
8/30/2012	1:08:20 PM	BCl3 valve closed
8/30/2012	1:08:20 PM	PH3 valve closed
8/30/2012	1:08:20 PM	SiCl4 pre valve closed
8/30/2012	1:08:20 PM	SiCl4 post valve closed
8/30/2012	1:08:20 PM	Bypass valve closed
8/30/2012	1:08:20 PM	Bubbler valve closed
8/30/2012	1:08:20 PM	Main Vac valve opened
8/30/2012	1:08:20 PM	Helium MFC set to  0.000000
8/30/2012	1:08:20 PM	H2 MFC set to  0.000000
8/30/2012	1:08:20 PM	BCl3 MFC set to  0.000000
8/30/2012	1:08:20 PM	PH3 MFC set to  0.000000
8/30/2012	1:08:20 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:08:20 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:08:20 PM	Tube furnace set to 200
8/30/2012	1:08:50 PM	H2 valve closed
8/30/2012	1:08:50 PM	BCl3 valve closed
8/30/2012	1:08:50 PM	PH3 valve closed
8/30/2012	1:08:50 PM	SiCl4 pre valve closed
8/30/2012	1:08:50 PM	SiCl4 post valve closed
8/30/2012	1:08:50 PM	Bypass valve closed
8/30/2012	1:08:50 PM	Bubbler valve closed
8/30/2012	1:08:50 PM	Helium valve opened
8/30/2012	1:08:50 PM	Main Vac valve opened
8/30/2012	1:08:50 PM	Helium MFC set to  20.000000
8/30/2012	1:08:50 PM	H2 MFC set to  0.000000
8/30/2012	1:08:50 PM	BCl3 MFC set to  0.000000
8/30/2012	1:08:50 PM	PH3 MFC set to  0.000000
8/30/2012	1:08:50 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:08:50 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:08:51 PM	Tube furnace set to 200
8/30/2012	1:09:21 PM	Helium valve closed
8/30/2012	1:09:21 PM	H2 valve closed
8/30/2012	1:09:21 PM	BCl3 valve closed
8/30/2012	1:09:21 PM	PH3 valve closed
8/30/2012	1:09:21 PM	SiCl4 pre valve closed
8/30/2012	1:09:21 PM	SiCl4 post valve closed
8/30/2012	1:09:21 PM	Bypass valve closed
8/30/2012	1:09:21 PM	Bubbler valve closed
8/30/2012	1:09:21 PM	Main Vac valve opened
8/30/2012	1:09:21 PM	Helium MFC set to  0.000000
8/30/2012	1:09:21 PM	H2 MFC set to  0.000000
8/30/2012	1:09:21 PM	BCl3 MFC set to  0.000000
8/30/2012	1:09:21 PM	PH3 MFC set to  0.000000
8/30/2012	1:09:21 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:09:21 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:09:21 PM	Tube furnace set to 200
8/30/2012	1:09:51 PM	H2 valve closed
8/30/2012	1:09:51 PM	BCl3 valve closed
8/30/2012	1:09:51 PM	PH3 valve closed
8/30/2012	1:09:51 PM	SiCl4 pre valve closed
8/30/2012	1:09:51 PM	SiCl4 post valve closed
8/30/2012	1:09:51 PM	Bypass valve closed
8/30/2012	1:09:51 PM	Bubbler valve closed
8/30/2012	1:09:51 PM	Helium valve opened
8/30/2012	1:09:51 PM	Main Vac valve opened
8/30/2012	1:09:51 PM	Helium MFC set to  20.000000
8/30/2012	1:09:51 PM	H2 MFC set to  0.000000
8/30/2012	1:09:51 PM	BCl3 MFC set to  0.000000
8/30/2012	1:09:51 PM	PH3 MFC set to  0.000000
8/30/2012	1:09:51 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:09:51 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:09:51 PM	Tube furnace set to 200
8/30/2012	1:10:21 PM	Helium valve closed
8/30/2012	1:10:21 PM	H2 valve closed
8/30/2012	1:10:21 PM	BCl3 valve closed
8/30/2012	1:10:21 PM	PH3 valve closed
8/30/2012	1:10:21 PM	SiCl4 pre valve closed
8/30/2012	1:10:21 PM	SiCl4 post valve closed
8/30/2012	1:10:21 PM	Bypass valve closed
8/30/2012	1:10:21 PM	Bubbler valve closed
8/30/2012	1:10:21 PM	Main Vac valve opened
8/30/2012	1:10:21 PM	Helium MFC set to  0.000000
8/30/2012	1:10:21 PM	H2 MFC set to  0.000000
8/30/2012	1:10:21 PM	BCl3 MFC set to  0.000000
8/30/2012	1:10:21 PM	PH3 MFC set to  0.000000
8/30/2012	1:10:21 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:10:21 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:10:21 PM	Tube furnace set to 200
8/30/2012	1:10:51 PM	H2 valve closed
8/30/2012	1:10:51 PM	BCl3 valve closed
8/30/2012	1:10:51 PM	PH3 valve closed
8/30/2012	1:10:51 PM	SiCl4 pre valve closed
8/30/2012	1:10:51 PM	SiCl4 post valve closed
8/30/2012	1:10:51 PM	Bypass valve closed
8/30/2012	1:10:51 PM	Bubbler valve closed
8/30/2012	1:10:51 PM	Helium valve opened
8/30/2012	1:10:51 PM	Main Vac valve opened
8/30/2012	1:10:51 PM	Helium MFC set to  20.000000
8/30/2012	1:10:51 PM	H2 MFC set to  0.000000
8/30/2012	1:10:51 PM	BCl3 MFC set to  0.000000
8/30/2012	1:10:51 PM	PH3 MFC set to  0.000000
8/30/2012	1:10:51 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:10:51 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:10:52 PM	Tube furnace set to 200
8/30/2012	1:11:22 PM	Helium valve closed
8/30/2012	1:11:22 PM	H2 valve closed
8/30/2012	1:11:22 PM	BCl3 valve closed
8/30/2012	1:11:22 PM	PH3 valve closed
8/30/2012	1:11:22 PM	SiCl4 pre valve closed
8/30/2012	1:11:22 PM	SiCl4 post valve closed
8/30/2012	1:11:22 PM	Bypass valve closed
8/30/2012	1:11:22 PM	Bubbler valve closed
8/30/2012	1:11:22 PM	Main Vac valve opened
8/30/2012	1:11:22 PM	Helium MFC set to  0.000000
8/30/2012	1:11:22 PM	H2 MFC set to  0.000000
8/30/2012	1:11:22 PM	BCl3 MFC set to  0.000000
8/30/2012	1:11:22 PM	PH3 MFC set to  0.000000
8/30/2012	1:11:22 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:11:22 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:11:22 PM	Tube furnace set to 200
8/30/2012	1:11:52 PM	H2 valve closed
8/30/2012	1:11:52 PM	BCl3 valve closed
8/30/2012	1:11:52 PM	PH3 valve closed
8/30/2012	1:11:52 PM	SiCl4 pre valve closed
8/30/2012	1:11:52 PM	SiCl4 post valve closed
8/30/2012	1:11:52 PM	Bypass valve closed
8/30/2012	1:11:52 PM	Bubbler valve closed
8/30/2012	1:11:52 PM	Helium valve opened
8/30/2012	1:11:52 PM	Main Vac valve opened
8/30/2012	1:11:52 PM	Helium MFC set to  20.000000
8/30/2012	1:11:52 PM	H2 MFC set to  0.000000
8/30/2012	1:11:52 PM	BCl3 MFC set to  0.000000
8/30/2012	1:11:52 PM	PH3 MFC set to  0.000000
8/30/2012	1:11:52 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:11:52 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:11:52 PM	Tube furnace set to 200
8/30/2012	1:12:22 PM	Helium valve closed
8/30/2012	1:12:22 PM	H2 valve closed
8/30/2012	1:12:22 PM	BCl3 valve closed
8/30/2012	1:12:22 PM	PH3 valve closed
8/30/2012	1:12:22 PM	SiCl4 pre valve closed
8/30/2012	1:12:22 PM	SiCl4 post valve closed
8/30/2012	1:12:22 PM	Bypass valve closed
8/30/2012	1:12:22 PM	Bubbler valve closed
8/30/2012	1:12:22 PM	Main Vac valve opened
8/30/2012	1:12:22 PM	Helium MFC set to  0.000000
8/30/2012	1:12:22 PM	H2 MFC set to  0.000000
8/30/2012	1:12:22 PM	BCl3 MFC set to  0.000000
8/30/2012	1:12:22 PM	PH3 MFC set to  0.000000
8/30/2012	1:12:22 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:12:22 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:12:22 PM	Tube furnace set to 0
8/30/2012	1:12:23 PM	Run finished at 1:12 PM
8/30/2012	1:28:40 PM	Main Vac valve closed
8/30/2012	1:28:55 PM	Main Vac valve opened
8/30/2012	1:30:44 PM	Recipe started at 1:30 PM
8/30/2012	1:30:44 PM	Helium valve closed
8/30/2012	1:30:44 PM	H2 valve closed
8/30/2012	1:30:44 PM	BCl3 valve closed
8/30/2012	1:30:44 PM	PH3 valve closed
8/30/2012	1:30:44 PM	SiCl4 pre valve closed
8/30/2012	1:30:44 PM	SiCl4 post valve closed
8/30/2012	1:30:44 PM	Main Vac valve closed
8/30/2012	1:30:44 PM	Bypass valve closed
8/30/2012	1:30:44 PM	Bubbler valve closed
8/30/2012	1:30:44 PM	Helium MFC set to  0.000000
8/30/2012	1:30:44 PM	H2 MFC set to  0.000000
8/30/2012	1:30:44 PM	BCl3 MFC set to  0.000000
8/30/2012	1:30:44 PM	PH3 MFC set to  0.000000
8/30/2012	1:30:44 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:30:44 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:30:44 PM	Tube furnace set to 0
8/30/2012	1:30:47 PM	Helium valve closed
8/30/2012	1:30:47 PM	BCl3 valve closed
8/30/2012	1:30:47 PM	PH3 valve closed
8/30/2012	1:30:47 PM	SiCl4 pre valve closed
8/30/2012	1:30:47 PM	SiCl4 post valve closed
8/30/2012	1:30:47 PM	Main Vac valve closed
8/30/2012	1:30:47 PM	Bypass valve closed
8/30/2012	1:30:47 PM	Bubbler valve closed
8/30/2012	1:30:47 PM	H2 valve opened
8/30/2012	1:30:47 PM	Helium MFC set to  0.000000
8/30/2012	1:30:47 PM	H2 MFC set to  500.000000
8/30/2012	1:30:47 PM	BCl3 MFC set to  0.000000
8/30/2012	1:30:47 PM	PH3 MFC set to  0.000000
8/30/2012	1:30:47 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:30:47 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:30:47 PM	Tube furnace set to 0
8/30/2012	1:32:00 PM	Helium valve closed
8/30/2012	1:32:00 PM	BCl3 valve closed
8/30/2012	1:32:00 PM	PH3 valve closed
8/30/2012	1:32:00 PM	SiCl4 pre valve closed
8/30/2012	1:32:00 PM	SiCl4 post valve closed
8/30/2012	1:32:00 PM	Main Vac valve closed
8/30/2012	1:32:00 PM	Bypass valve closed
8/30/2012	1:32:00 PM	H2 valve opened
8/30/2012	1:32:00 PM	Bubbler valve opened
8/30/2012	1:32:00 PM	Helium MFC set to  0.000000
8/30/2012	1:32:00 PM	H2 MFC set to  500.000000
8/30/2012	1:32:00 PM	BCl3 MFC set to  0.000000
8/30/2012	1:32:00 PM	PH3 MFC set to  0.000000
8/30/2012	1:32:00 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:32:00 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:32:00 PM	Tube furnace set to 0
8/30/2012	1:32:01 PM	Helium valve closed
8/30/2012	1:32:01 PM	BCl3 valve closed
8/30/2012	1:32:01 PM	PH3 valve closed
8/30/2012	1:32:01 PM	SiCl4 pre valve closed
8/30/2012	1:32:01 PM	SiCl4 post valve closed
8/30/2012	1:32:01 PM	Main Vac valve closed
8/30/2012	1:32:01 PM	Bypass valve closed
8/30/2012	1:32:01 PM	H2 valve opened
8/30/2012	1:32:01 PM	Bubbler valve opened
8/30/2012	1:32:01 PM	Helium MFC set to  0.000000
8/30/2012	1:32:01 PM	H2 MFC set to  500.000000
8/30/2012	1:32:01 PM	BCl3 MFC set to  0.000000
8/30/2012	1:32:01 PM	PH3 MFC set to  0.000000
8/30/2012	1:32:01 PM	SiCl4 MFC set to  0.000000
8/30/2012	1:32:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:32:01 PM	Tube furnace set to 1000
8/30/2012	1:52:01 PM	Helium valve closed
8/30/2012	1:52:01 PM	PH3 valve closed
8/30/2012	1:52:01 PM	Main Vac valve closed
8/30/2012	1:52:01 PM	Bypass valve closed
8/30/2012	1:52:01 PM	H2 valve opened
8/30/2012	1:52:01 PM	BCl3 valve opened
8/30/2012	1:52:01 PM	SiCl4 pre valve opened
8/30/2012	1:52:01 PM	SiCl4 post valve opened
8/30/2012	1:52:01 PM	Bubbler valve opened
8/30/2012	1:52:01 PM	Helium MFC set to  0.000000
8/30/2012	1:52:01 PM	H2 MFC set to  450.000000
8/30/2012	1:52:01 PM	BCl3 MFC set to  1.500000
8/30/2012	1:52:01 PM	PH3 MFC set to  0.000000
8/30/2012	1:52:01 PM	SiCl4 MFC set to  50.000000
8/30/2012	1:52:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	1:52:01 PM	Tube furnace set to 1000
8/30/2012	2:12:01 PM	Helium valve closed
8/30/2012	2:12:01 PM	BCl3 valve closed
8/30/2012	2:12:01 PM	PH3 valve closed
8/30/2012	2:12:01 PM	SiCl4 pre valve closed
8/30/2012	2:12:01 PM	SiCl4 post valve closed
8/30/2012	2:12:01 PM	Main Vac valve closed
8/30/2012	2:12:01 PM	Bypass valve closed
8/30/2012	2:12:01 PM	H2 valve opened
8/30/2012	2:12:01 PM	Bubbler valve opened
8/30/2012	2:12:01 PM	Helium MFC set to  0.000000
8/30/2012	2:12:01 PM	H2 MFC set to  500.000000
8/30/2012	2:12:01 PM	BCl3 MFC set to  0.000000
8/30/2012	2:12:01 PM	PH3 MFC set to  0.000000
8/30/2012	2:12:01 PM	SiCl4 MFC set to  0.000000
8/30/2012	2:12:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	2:12:01 PM	Tube furnace set to 950
8/30/2012	2:14:01 PM	Helium valve closed
8/30/2012	2:14:01 PM	BCl3 valve closed
8/30/2012	2:14:01 PM	PH3 valve closed
8/30/2012	2:14:01 PM	SiCl4 pre valve closed
8/30/2012	2:14:01 PM	SiCl4 post valve closed
8/30/2012	2:14:01 PM	Main Vac valve closed
8/30/2012	2:14:01 PM	Bypass valve closed
8/30/2012	2:14:01 PM	H2 valve opened
8/30/2012	2:14:01 PM	Bubbler valve opened
8/30/2012	2:14:01 PM	Helium MFC set to  0.000000
8/30/2012	2:14:01 PM	H2 MFC set to  500.000000
8/30/2012	2:14:01 PM	BCl3 MFC set to  0.000000
8/30/2012	2:14:01 PM	PH3 MFC set to  0.000000
8/30/2012	2:14:01 PM	SiCl4 MFC set to  0.000000
8/30/2012	2:14:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	2:14:02 PM	Tube furnace set to 900
8/30/2012	2:16:02 PM	Helium valve closed
8/30/2012	2:16:02 PM	BCl3 valve closed
8/30/2012	2:16:02 PM	PH3 valve closed
8/30/2012	2:16:02 PM	SiCl4 pre valve closed
8/30/2012	2:16:02 PM	SiCl4 post valve closed
8/30/2012	2:16:02 PM	Main Vac valve closed
8/30/2012	2:16:02 PM	Bypass valve closed
8/30/2012	2:16:02 PM	H2 valve opened
8/30/2012	2:16:02 PM	Bubbler valve opened
8/30/2012	2:16:02 PM	Helium MFC set to  0.000000
8/30/2012	2:16:02 PM	H2 MFC set to  500.000000
8/30/2012	2:16:02 PM	BCl3 MFC set to  0.000000
8/30/2012	2:16:02 PM	PH3 MFC set to  0.000000
8/30/2012	2:16:02 PM	SiCl4 MFC set to  0.000000
8/30/2012	2:16:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	2:16:02 PM	Tube furnace set to 850
8/30/2012	2:18:02 PM	H2 valve closed
8/30/2012	2:18:02 PM	BCl3 valve closed
8/30/2012	2:18:02 PM	PH3 valve closed
8/30/2012	2:18:02 PM	SiCl4 pre valve closed
8/30/2012	2:18:02 PM	SiCl4 post valve closed
8/30/2012	2:18:02 PM	Main Vac valve closed
8/30/2012	2:18:02 PM	Bypass valve closed
8/30/2012	2:18:02 PM	Helium valve opened
8/30/2012	2:18:02 PM	Bubbler valve opened
8/30/2012	2:18:02 PM	Helium MFC set to  500.000000
8/30/2012	2:18:02 PM	H2 MFC set to  0.000000
8/30/2012	2:18:02 PM	BCl3 MFC set to  0.000000
8/30/2012	2:18:02 PM	PH3 MFC set to  0.000000
8/30/2012	2:18:02 PM	SiCl4 MFC set to  0.000000
8/30/2012	2:18:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	2:18:02 PM	Tube furnace set to 800
8/30/2012	2:20:02 PM	H2 valve closed
8/30/2012	2:20:02 PM	BCl3 valve closed
8/30/2012	2:20:02 PM	PH3 valve closed
8/30/2012	2:20:02 PM	SiCl4 pre valve closed
8/30/2012	2:20:02 PM	SiCl4 post valve closed
8/30/2012	2:20:02 PM	Main Vac valve closed
8/30/2012	2:20:02 PM	Bypass valve closed
8/30/2012	2:20:02 PM	Helium valve opened
8/30/2012	2:20:02 PM	Bubbler valve opened
8/30/2012	2:20:02 PM	Helium MFC set to  500.000000
8/30/2012	2:20:02 PM	H2 MFC set to  0.000000
8/30/2012	2:20:02 PM	BCl3 MFC set to  0.000000
8/30/2012	2:20:02 PM	PH3 MFC set to  0.000000
8/30/2012	2:20:02 PM	SiCl4 MFC set to  0.000000
8/30/2012	2:20:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	2:20:02 PM	Tube furnace set to 750
8/30/2012	2:22:02 PM	H2 valve closed
8/30/2012	2:22:02 PM	BCl3 valve closed
8/30/2012	2:22:02 PM	PH3 valve closed
8/30/2012	2:22:02 PM	SiCl4 pre valve closed
8/30/2012	2:22:02 PM	SiCl4 post valve closed
8/30/2012	2:22:02 PM	Main Vac valve closed
8/30/2012	2:22:02 PM	Bypass valve closed
8/30/2012	2:22:02 PM	Helium valve opened
8/30/2012	2:22:02 PM	Bubbler valve opened
8/30/2012	2:22:02 PM	Helium MFC set to  500.000000
8/30/2012	2:22:02 PM	H2 MFC set to  0.000000
8/30/2012	2:22:02 PM	BCl3 MFC set to  0.000000
8/30/2012	2:22:02 PM	PH3 MFC set to  0.000000
8/30/2012	2:22:02 PM	SiCl4 MFC set to  0.000000
8/30/2012	2:22:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	2:22:03 PM	Tube furnace set to 0
8/30/2012	2:42:02 PM	Helium valve closed
8/30/2012	2:42:02 PM	H2 valve closed
8/30/2012	2:42:02 PM	BCl3 valve closed
8/30/2012	2:42:02 PM	PH3 valve closed
8/30/2012	2:42:03 PM	SiCl4 pre valve closed
8/30/2012	2:42:03 PM	SiCl4 post valve closed
8/30/2012	2:42:03 PM	Main Vac valve closed
8/30/2012	2:42:03 PM	Bypass valve closed
8/30/2012	2:42:03 PM	Bubbler valve closed
8/30/2012	2:42:03 PM	Helium MFC set to  0.000000
8/30/2012	2:42:03 PM	H2 MFC set to  0.000000
8/30/2012	2:42:03 PM	BCl3 MFC set to  0.000000
8/30/2012	2:42:03 PM	PH3 MFC set to  0.000000
8/30/2012	2:42:03 PM	SiCl4 MFC set to  0.000000
8/30/2012	2:42:03 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	2:42:03 PM	Tube furnace set to 0
8/30/2012	2:42:04 PM	Run finished at 2:42 PM
8/30/2012	3:16:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2012	3:16:29 PM	Recipe started at 3:16 PM
8/30/2012	3:16:30 PM	Helium valve closed
8/30/2012	3:16:30 PM	H2 valve closed
8/30/2012	3:16:30 PM	BCl3 valve closed
8/30/2012	3:16:30 PM	PH3 valve closed
8/30/2012	3:16:30 PM	SiCl4 pre valve closed
8/30/2012	3:16:30 PM	SiCl4 post valve closed
8/30/2012	3:16:30 PM	Main Vac valve closed
8/30/2012	3:16:30 PM	Bypass valve closed
8/30/2012	3:16:30 PM	Bubbler valve closed
8/30/2012	3:16:30 PM	Helium MFC set to  0.000000
8/30/2012	3:16:30 PM	H2 MFC set to  0.000000
8/30/2012	3:16:30 PM	BCl3 MFC set to  0.000000
8/30/2012	3:16:30 PM	PH3 MFC set to  0.000000
8/30/2012	3:16:30 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:16:30 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:16:30 PM	Tube furnace set to 0
8/30/2012	3:16:33 PM	H2 valve closed
8/30/2012	3:16:33 PM	BCl3 valve closed
8/30/2012	3:16:33 PM	PH3 valve closed
8/30/2012	3:16:33 PM	SiCl4 pre valve closed
8/30/2012	3:16:33 PM	SiCl4 post valve closed
8/30/2012	3:16:33 PM	Main Vac valve closed
8/30/2012	3:16:33 PM	Bypass valve closed
8/30/2012	3:16:33 PM	Bubbler valve closed
8/30/2012	3:16:33 PM	Helium valve opened
8/30/2012	3:16:33 PM	Helium MFC set to  500.000000
8/30/2012	3:16:33 PM	H2 MFC set to  0.000000
8/30/2012	3:16:33 PM	BCl3 MFC set to  0.000000
8/30/2012	3:16:33 PM	PH3 MFC set to  0.000000
8/30/2012	3:16:33 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:16:33 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:16:33 PM	Tube furnace set to 0
8/30/2012	3:16:38 PM	Helium valve closed
8/30/2012	3:16:38 PM	H2 valve closed
8/30/2012	3:16:38 PM	BCl3 valve closed
8/30/2012	3:16:38 PM	PH3 valve closed
8/30/2012	3:16:38 PM	SiCl4 pre valve closed
8/30/2012	3:16:38 PM	SiCl4 post valve closed
8/30/2012	3:16:38 PM	Main Vac valve closed
8/30/2012	3:16:38 PM	Bypass valve closed
8/30/2012	3:16:38 PM	Bubbler valve closed
8/30/2012	3:16:38 PM	Helium MFC set to  0.000000
8/30/2012	3:16:38 PM	H2 MFC set to  0.000000
8/30/2012	3:16:38 PM	BCl3 MFC set to  0.000000
8/30/2012	3:16:38 PM	PH3 MFC set to  0.000000
8/30/2012	3:16:38 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:16:38 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:16:38 PM	Tube furnace set to 0
8/30/2012	3:16:39 PM	Run finished at 3:16 PM
8/30/2012	3:16:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2012	3:19:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2012	3:19:25 PM	Recipe started at 3:19 PM
8/30/2012	3:19:25 PM	Helium valve closed
8/30/2012	3:19:25 PM	H2 valve closed
8/30/2012	3:19:25 PM	BCl3 valve closed
8/30/2012	3:19:25 PM	PH3 valve closed
8/30/2012	3:19:25 PM	SiCl4 pre valve closed
8/30/2012	3:19:25 PM	SiCl4 post valve closed
8/30/2012	3:19:25 PM	Main Vac valve closed
8/30/2012	3:19:25 PM	Bubbler valve closed
8/30/2012	3:19:25 PM	Bypass valve opened
8/30/2012	3:19:25 PM	Helium MFC set to  0.000000
8/30/2012	3:19:25 PM	H2 MFC set to  0.000000
8/30/2012	3:19:25 PM	BCl3 MFC set to  0.000000
8/30/2012	3:19:25 PM	PH3 MFC set to  0.000000
8/30/2012	3:19:25 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:19:25 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:19:25 PM	Tube furnace set to 0
8/30/2012	3:20:41 PM	Helium valve closed
8/30/2012	3:20:41 PM	H2 valve closed
8/30/2012	3:20:41 PM	BCl3 valve closed
8/30/2012	3:20:41 PM	PH3 valve closed
8/30/2012	3:20:41 PM	SiCl4 pre valve closed
8/30/2012	3:20:41 PM	SiCl4 post valve closed
8/30/2012	3:20:41 PM	Main Vac valve closed
8/30/2012	3:20:41 PM	Bubbler valve closed
8/30/2012	3:20:41 PM	Bypass valve opened
8/30/2012	3:20:41 PM	Helium MFC set to  0.000000
8/30/2012	3:20:41 PM	H2 MFC set to  0.000000
8/30/2012	3:20:41 PM	BCl3 MFC set to  0.000000
8/30/2012	3:20:41 PM	PH3 MFC set to  0.000000
8/30/2012	3:20:41 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:20:41 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:20:41 PM	Tube furnace set to 0
8/30/2012	3:21:41 PM	Helium valve closed
8/30/2012	3:21:41 PM	H2 valve closed
8/30/2012	3:21:41 PM	BCl3 valve closed
8/30/2012	3:21:41 PM	PH3 valve closed
8/30/2012	3:21:41 PM	SiCl4 pre valve closed
8/30/2012	3:21:41 PM	SiCl4 post valve closed
8/30/2012	3:21:41 PM	Bypass valve closed
8/30/2012	3:21:41 PM	Bubbler valve closed
8/30/2012	3:21:41 PM	Main Vac valve opened
8/30/2012	3:21:41 PM	Helium MFC set to  0.000000
8/30/2012	3:21:41 PM	H2 MFC set to  0.000000
8/30/2012	3:21:41 PM	BCl3 MFC set to  0.000000
8/30/2012	3:21:41 PM	PH3 MFC set to  0.000000
8/30/2012	3:21:41 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:21:41 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:21:41 PM	Tube furnace set to 0
8/30/2012	3:21:42 PM	Run finished at 3:21 PM
8/30/2012	3:21:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2012	3:36:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2012	3:36:08 PM	Recipe started at 3:36 PM
8/30/2012	3:36:08 PM	Helium valve closed
8/30/2012	3:36:08 PM	H2 valve closed
8/30/2012	3:36:08 PM	BCl3 valve closed
8/30/2012	3:36:08 PM	PH3 valve closed
8/30/2012	3:36:08 PM	SiCl4 pre valve closed
8/30/2012	3:36:08 PM	SiCl4 post valve closed
8/30/2012	3:36:08 PM	Main Vac valve closed
8/30/2012	3:36:08 PM	Bypass valve closed
8/30/2012	3:36:08 PM	Bubbler valve closed
8/30/2012	3:36:08 PM	Helium MFC set to  0.000000
8/30/2012	3:36:08 PM	H2 MFC set to  0.000000
8/30/2012	3:36:08 PM	BCl3 MFC set to  0.000000
8/30/2012	3:36:08 PM	PH3 MFC set to  0.000000
8/30/2012	3:36:08 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:36:08 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:36:08 PM	Tube furnace set to 0
8/30/2012	3:36:11 PM	H2 valve closed
8/30/2012	3:36:11 PM	BCl3 valve closed
8/30/2012	3:36:11 PM	PH3 valve closed
8/30/2012	3:36:11 PM	SiCl4 pre valve closed
8/30/2012	3:36:11 PM	SiCl4 post valve closed
8/30/2012	3:36:11 PM	Main Vac valve closed
8/30/2012	3:36:11 PM	Bypass valve closed
8/30/2012	3:36:11 PM	Bubbler valve closed
8/30/2012	3:36:11 PM	Helium valve opened
8/30/2012	3:36:11 PM	Helium MFC set to  500.000000
8/30/2012	3:36:11 PM	H2 MFC set to  0.000000
8/30/2012	3:36:11 PM	BCl3 MFC set to  0.000000
8/30/2012	3:36:11 PM	PH3 MFC set to  0.000000
8/30/2012	3:36:11 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:36:11 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:36:11 PM	Tube furnace set to 0
8/30/2012	3:37:20 PM	Helium valve closed
8/30/2012	3:37:20 PM	H2 valve closed
8/30/2012	3:37:20 PM	BCl3 valve closed
8/30/2012	3:37:20 PM	PH3 valve closed
8/30/2012	3:37:20 PM	SiCl4 pre valve closed
8/30/2012	3:37:20 PM	SiCl4 post valve closed
8/30/2012	3:37:20 PM	Main Vac valve closed
8/30/2012	3:37:20 PM	Bypass valve closed
8/30/2012	3:37:20 PM	Bubbler valve closed
8/30/2012	3:37:20 PM	Helium MFC set to  0.000000
8/30/2012	3:37:20 PM	H2 MFC set to  0.000000
8/30/2012	3:37:20 PM	BCl3 MFC set to  0.000000
8/30/2012	3:37:20 PM	PH3 MFC set to  0.000000
8/30/2012	3:37:20 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:37:20 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:37:20 PM	Tube furnace set to 0
8/30/2012	3:37:21 PM	Run finished at 3:37 PM
8/30/2012	3:37:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2012	3:49:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2012	3:49:36 PM	Recipe started at 3:49 PM
8/30/2012	3:49:36 PM	Helium valve closed
8/30/2012	3:49:36 PM	H2 valve closed
8/30/2012	3:49:36 PM	BCl3 valve closed
8/30/2012	3:49:36 PM	PH3 valve closed
8/30/2012	3:49:36 PM	SiCl4 pre valve closed
8/30/2012	3:49:36 PM	SiCl4 post valve closed
8/30/2012	3:49:36 PM	Main Vac valve closed
8/30/2012	3:49:36 PM	Bubbler valve closed
8/30/2012	3:49:36 PM	Bypass valve opened
8/30/2012	3:49:36 PM	Helium MFC set to  0.000000
8/30/2012	3:49:36 PM	H2 MFC set to  0.000000
8/30/2012	3:49:36 PM	BCl3 MFC set to  0.000000
8/30/2012	3:49:36 PM	PH3 MFC set to  0.000000
8/30/2012	3:49:36 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:49:36 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:49:36 PM	Tube furnace set to 0
8/30/2012	3:51:02 PM	Helium valve closed
8/30/2012	3:51:02 PM	H2 valve closed
8/30/2012	3:51:02 PM	BCl3 valve closed
8/30/2012	3:51:02 PM	PH3 valve closed
8/30/2012	3:51:02 PM	SiCl4 pre valve closed
8/30/2012	3:51:02 PM	SiCl4 post valve closed
8/30/2012	3:51:02 PM	Main Vac valve closed
8/30/2012	3:51:02 PM	Bubbler valve closed
8/30/2012	3:51:02 PM	Bypass valve opened
8/30/2012	3:51:02 PM	Helium MFC set to  0.000000
8/30/2012	3:51:02 PM	H2 MFC set to  0.000000
8/30/2012	3:51:02 PM	BCl3 MFC set to  0.000000
8/30/2012	3:51:02 PM	PH3 MFC set to  0.000000
8/30/2012	3:51:02 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:51:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:51:02 PM	Tube furnace set to 0
8/30/2012	3:52:02 PM	Helium valve closed
8/30/2012	3:52:02 PM	H2 valve closed
8/30/2012	3:52:02 PM	BCl3 valve closed
8/30/2012	3:52:02 PM	PH3 valve closed
8/30/2012	3:52:02 PM	SiCl4 pre valve closed
8/30/2012	3:52:02 PM	SiCl4 post valve closed
8/30/2012	3:52:02 PM	Bypass valve closed
8/30/2012	3:52:02 PM	Bubbler valve closed
8/30/2012	3:52:02 PM	Main Vac valve opened
8/30/2012	3:52:02 PM	Helium MFC set to  0.000000
8/30/2012	3:52:02 PM	H2 MFC set to  0.000000
8/30/2012	3:52:02 PM	BCl3 MFC set to  0.000000
8/30/2012	3:52:02 PM	PH3 MFC set to  0.000000
8/30/2012	3:52:02 PM	SiCl4 MFC set to  0.000000
8/30/2012	3:52:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2012	3:52:02 PM	Tube furnace set to 0
8/30/2012	3:52:03 PM	Run finished at 3:52 PM
8/30/2012	3:52:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2012	3:53:16 PM	Main Vac valve closed
8/30/2012	3:53:22 PM	Main Vac valve opened
